[{"@context":"http:\/\/schema.org\/","@type":"BlogPosting","@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/11989#BlogPosting","mainEntityOfPage":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/11989","headline":"IONNIMPLANER  – \u30a6\u30a3\u30ad\u30da\u30c7\u30a3\u30a2\u30a6\u30a3\u30ad\u30da\u30c7\u30a3\u30a2","name":"IONNIMPLANER  – \u30a6\u30a3\u30ad\u30da\u30c7\u30a3\u30a2\u30a6\u30a3\u30ad\u30da\u30c7\u30a3\u30a2","description":"before-content-x4 IONENIMPLANTER \u62db\u5f85\u3055\u308c\u305f\u7c92\u5b50\uff08\u30a4\u30aa\u30f3\uff09\u3067\u6750\u6599\u3092\u767a\u5c04\u3057\u3001\u305d\u308c\u3089\u3092\u57fa\u8cea\uff08\u30a4\u30aa\u30f3\u79fb\u690d\uff09\u306b\u6301\u3061\u8fbc\u3093\u3067\u3001\u6750\u6599\u7279\u6027\u3092\u5909\u66f4\u3059\u308b\u6a5f\u68b0\u3067\u3059\u3002 \u30a4\u30aa\u30f3\u79fb\u690d\u30b7\u30b9\u30c6\u30e0\u3002 after-content-x4 \u3059\u3079\u3066\u306e\u30a4\u30aa\u30f3\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u306f\u3001\u30a4\u30aa\u30f3\u6e90\u3001\u52a0\u901f\u30b7\u30b9\u30c6\u30e0\uff08\u30a4\u30aa\u30f3\u52a0\u901f\u5668\uff09\u3001\u62bd\u51fa\u30ab\u30d0\u30fc\u3001\u30a4\u30aa\u30f3\u306e\u8cea\u91cf\u3068\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u96e2\u3001\u30b9\u30ad\u30e3\u30f3\u30b7\u30b9\u30c6\u30e0\u3001\u304a\u3088\u3073\u30a6\u30a7\u30fc\u30cf\u3092\u51e6\u7406\u3059\u308b\u30c1\u30e3\u30f3\u30d0\u30fc\u3067\u69cb\u6210\u3055\u308c\u3066\u3044\u307e\u3059\u3002 \u30b7\u30ea\u30b3\u30f3\u3084\u305d\u306e\u4ed6\u306e\u534a\u5c0e\u4f53\u306b\u57cb\u3081\u8fbc\u307e\u308c\u3066\u3044\u307e\u3059B.\u30ac\u30ea\u30a6\u30e0\u30a2\u30eb\u30bb\u30cb\u30c9\uff08GAAS\uff09\u3001III V\u30ea\u30df\u30c3\u30bf\u30fc\u3002 after-content-x4 \u30ac\u30b9\u306f\u30a4\u30aa\u30f3\u6e90\u3067\u30a4\u30aa\u30f3\u5316\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u30a4\u30aa\u30f3\u6e90\u306f\u3001Dotant\u30ac\u30b9\u306b\u3088\u3063\u3066\u6d41\u308c\u308b\u52a0\u71b1\u7dda\u3067\u69cb\u6210\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3044\u304f\u3064\u304b\u306e\u9053\u5177\u3067\u306f\u3001SO -CALLED\u306e\u300c\u6c17\u5316\u5668\u300d\u3092\u4f7f\u7528\u3057\u3066\u3001\u56fa\u4f53\uff08\u30d9\u30ea\u30ea\u30a6\u30e0\u306a\u3069\uff09\u3068\u3057\u3066\u767a\u751f\u3059\u308b\u7269\u8cea\u3092\u79fb\u690d\u3059\u308b\u305f\u3081\u306b\u3082\u4f7f\u7528\u3067\u304d\u307e\u3059\u3002\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u304c\u8cea\u91cf\/\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u96e2\u306e\u305f\u3081\u306b\u78c1\u77f3\u306b\u5230\u9054\u3059\u308b\u524d\u306b\u3001\u30a4\u30aa\u30f3\u5316\u3055\u308c\u305f\u30c9\u30a2\u30f3\u30c8\u304c\u52a0\u901f\uff08\u901a\u5e3810 kV\uff09\u306b\u306a\u308a\u307e\u3059\u3002 Selection Magnet\u306b\u3088\u308b\u3068\u3001\u30e1\u30ac\u30dc\u30eb\u307e\u3067\u306eRe\u30a2\u30af\u30bb\u30e9\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u884c\u308f\u308c\u307e\u3059\u3002\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u306f\u3001\u901a\u5e38\u3001\u30bf\u30fc\u30dc\u5206\u5b50\u30dd\u30f3\u30d7\u307e\u305f\u306f\u6975\u4f4e\u6e29\u3067\u751f\u6210\u3055\u308c\u308b\u8d85\u7a74\u306e\u771f\u7a7a\u3067\u884c\u308f\u308c\u307e\u3059\u3002 \u8981\u7d20\u306f\u3001\u30db\u30a6\u7d20\u3084\u30a4\u30f3\u30b8\u30a6\u30e0\u306a\u3069\u306e\u30a2\u30af\u30bb\u30d7\u30bf\u30fc\u3001\u307e\u305f\u306f\u30ea\u30f3\u3084\u30d2\u7d20\u306a\u3069\u306e\u30c9\u30ca\u30fc\u3068\u3057\u3066\u6a5f\u80fd\u3059\u308b\u30c9\u30fc\u30d1\u30fc\u3068\u3057\u3066\u6a5f\u80fd\u3057\u307e\u3059\u3002\u4f8b\u306f\u3001\u6388\u4e0e\u3055\u308c\u308b\u8cc7\u6599\u3068\u3057\u3066\u306e\u30b7\u30ea\u30b3\u30f3\u306b\u95a2\u9023\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u8981\u7d20\u306f\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u57fa\u672c\u7684\u306a\u5f62\u3067\u306f\u4f7f\u7528\u3055\u308c\u307e\u305b\u3093\u304c\u3001\u6c17\u4f53\u307e\u305f\u306f\u56fa\u4f53\u306e\u5f62\uff08\u7c89\u672b\uff09\u3067\u7d50\u5408\u3055\u308c\u307e\u3059\u3002 \u6b21\u306e\u57fa\u672c\u7684\u306a\u30bf\u30a4\u30d7\u306f\u3001\u534a\u5c0e\u4f53\u751f\u7523\u3068\u533a\u5225\u3055\u308c\u307e\u3059\u3002 [\u521d\u3081] \u4e2d\u5bb9\u91cf\u306e\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8 10 keV\u304b\u3089200","datePublished":"2021-11-28","dateModified":"2021-11-28","author":{"@type":"Person","@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/author\/lordneo#Person","name":"lordneo","url":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/author\/lordneo","image":{"@type":"ImageObject","@id":"https:\/\/secure.gravatar.com\/avatar\/44a4cee54c4c053e967fe3e7d054edd4?s=96&d=mm&r=g","url":"https:\/\/secure.gravatar.com\/avatar\/44a4cee54c4c053e967fe3e7d054edd4?s=96&d=mm&r=g","height":96,"width":96}},"publisher":{"@type":"Organization","name":"Enzyklop\u00e4die","logo":{"@type":"ImageObject","@id":"https:\/\/wiki.edu.vn\/wiki4\/wp-content\/uploads\/2023\/08\/download.jpg","url":"https:\/\/wiki.edu.vn\/wiki4\/wp-content\/uploads\/2023\/08\/download.jpg","width":600,"height":60}},"image":{"@type":"ImageObject","@id":"https:\/\/upload.wikimedia.org\/wikipedia\/commons\/thumb\/2\/28\/Ion_implantation_machine_at_LAAS_0521.jpg\/220px-Ion_implantation_machine_at_LAAS_0521.jpg","url":"https:\/\/upload.wikimedia.org\/wikipedia\/commons\/thumb\/2\/28\/Ion_implantation_machine_at_LAAS_0521.jpg\/220px-Ion_implantation_machine_at_LAAS_0521.jpg","height":"329","width":"220"},"url":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/11989","wordCount":933,"articleBody":"     (adsbygoogle = window.adsbygoogle || []).push({});before-content-x4IONENIMPLANTER \u62db\u5f85\u3055\u308c\u305f\u7c92\u5b50\uff08\u30a4\u30aa\u30f3\uff09\u3067\u6750\u6599\u3092\u767a\u5c04\u3057\u3001\u305d\u308c\u3089\u3092\u57fa\u8cea\uff08\u30a4\u30aa\u30f3\u79fb\u690d\uff09\u306b\u6301\u3061\u8fbc\u3093\u3067\u3001\u6750\u6599\u7279\u6027\u3092\u5909\u66f4\u3059\u308b\u6a5f\u68b0\u3067\u3059\u3002  \u30a4\u30aa\u30f3\u79fb\u690d\u30b7\u30b9\u30c6\u30e0\u3002        (adsbygoogle = window.adsbygoogle || []).push({});after-content-x4\u3059\u3079\u3066\u306e\u30a4\u30aa\u30f3\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u306f\u3001\u30a4\u30aa\u30f3\u6e90\u3001\u52a0\u901f\u30b7\u30b9\u30c6\u30e0\uff08\u30a4\u30aa\u30f3\u52a0\u901f\u5668\uff09\u3001\u62bd\u51fa\u30ab\u30d0\u30fc\u3001\u30a4\u30aa\u30f3\u306e\u8cea\u91cf\u3068\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u96e2\u3001\u30b9\u30ad\u30e3\u30f3\u30b7\u30b9\u30c6\u30e0\u3001\u304a\u3088\u3073\u30a6\u30a7\u30fc\u30cf\u3092\u51e6\u7406\u3059\u308b\u30c1\u30e3\u30f3\u30d0\u30fc\u3067\u69cb\u6210\u3055\u308c\u3066\u3044\u307e\u3059\u3002 \u30b7\u30ea\u30b3\u30f3\u3084\u305d\u306e\u4ed6\u306e\u534a\u5c0e\u4f53\u306b\u57cb\u3081\u8fbc\u307e\u308c\u3066\u3044\u307e\u3059B.\u30ac\u30ea\u30a6\u30e0\u30a2\u30eb\u30bb\u30cb\u30c9\uff08GAAS\uff09\u3001III V\u30ea\u30df\u30c3\u30bf\u30fc\u3002        (adsbygoogle = window.adsbygoogle || []).push({});after-content-x4\u30ac\u30b9\u306f\u30a4\u30aa\u30f3\u6e90\u3067\u30a4\u30aa\u30f3\u5316\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u30a4\u30aa\u30f3\u6e90\u306f\u3001Dotant\u30ac\u30b9\u306b\u3088\u3063\u3066\u6d41\u308c\u308b\u52a0\u71b1\u7dda\u3067\u69cb\u6210\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3044\u304f\u3064\u304b\u306e\u9053\u5177\u3067\u306f\u3001SO -CALLED\u306e\u300c\u6c17\u5316\u5668\u300d\u3092\u4f7f\u7528\u3057\u3066\u3001\u56fa\u4f53\uff08\u30d9\u30ea\u30ea\u30a6\u30e0\u306a\u3069\uff09\u3068\u3057\u3066\u767a\u751f\u3059\u308b\u7269\u8cea\u3092\u79fb\u690d\u3059\u308b\u305f\u3081\u306b\u3082\u4f7f\u7528\u3067\u304d\u307e\u3059\u3002\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u304c\u8cea\u91cf\/\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u96e2\u306e\u305f\u3081\u306b\u78c1\u77f3\u306b\u5230\u9054\u3059\u308b\u524d\u306b\u3001\u30a4\u30aa\u30f3\u5316\u3055\u308c\u305f\u30c9\u30a2\u30f3\u30c8\u304c\u52a0\u901f\uff08\u901a\u5e3810 kV\uff09\u306b\u306a\u308a\u307e\u3059\u3002 Selection Magnet\u306b\u3088\u308b\u3068\u3001\u30e1\u30ac\u30dc\u30eb\u307e\u3067\u306eRe\u30a2\u30af\u30bb\u30e9\u30ec\u30fc\u30b7\u30e7\u30f3\u304c\u884c\u308f\u308c\u307e\u3059\u3002\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u306f\u3001\u901a\u5e38\u3001\u30bf\u30fc\u30dc\u5206\u5b50\u30dd\u30f3\u30d7\u307e\u305f\u306f\u6975\u4f4e\u6e29\u3067\u751f\u6210\u3055\u308c\u308b\u8d85\u7a74\u306e\u771f\u7a7a\u3067\u884c\u308f\u308c\u307e\u3059\u3002 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\u4e2d\u5bb9\u91cf\u306e\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8 10 keV\u304b\u3089200 keV\u307e\u3067\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u305f\u3081\u306b\u30011 \u00b5A\u304b\u30895 mA\u306e\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u30d5\u30ed\u30fc\u3092\u4f7f\u7528\u3057\u307e\u3059 \u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8 80 keV\u304b\u3089200 keV\u307e\u3067\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u305f\u3081\u306b\u3001100 \u00b5A\u304b\u308930 mA\u306e\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u30d5\u30ed\u30fc\u3092\u4f7f\u7528\u3057\u307e\u3059 \u4f4e\u30a8\u30cd\u30eb\u30ae\u30fc\u30d7\u30e9\u30f3\u30ca\u30fc 0.2 keV\u304b\u308980 keV\u307e\u3067\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u305f\u3081\u306b\u30011 Ma\u304b\u308920 mA\u306e\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u30d5\u30ed\u30fc\u3092\u4f7f\u7528\u3057\u307e\u3059 \u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc \u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u30d5\u30ed\u30fc\u306f\u3001200 keV\u304b\u30895 MeV\u307e\u3067\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u305f\u3081\u306b10 \u00b5A\u304b\u30891 mA\u306e\u3082\u306e\u306b\u306a\u308a\u307e\u3059 [2] \u305d\u3057\u3066\u3088\u308a\u9ad8\u3044\uff08\u6700\u592710 MEV [3] \uff09\uff09 \u3053\u3053\u3067\u8a00\u53ca\u3055\u308c\u3066\u3044\u308b\u5236\u9650\u306f\u5927\u307e\u304b\u306a\u65b9\u5411\u3067\u3042\u308a\u3001\u6587\u732e\u304b\u3089\u306e\u60c5\u5831\u306f\u5909\u52d5\u3057\u307e\u3059\u3001cf\u3002 [4] [5] [6] 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\u30d0\u30c3\u30c1\u30de\u30b7\u30f3\uff08\u3044\u304f\u3064\u304b\u306e\u30a6\u30a7\u30fc\u30cf\u304c\u540c\u6642\u306b\u51e6\u7406\u3055\u308c\u307e\u3059\uff09 \u30b7\u30f3\u30b0\u30eb\u30ef\u30fc\u30d5\u30a1\u30fc\u30de\u30b7\u30f3\uff08\u30a6\u30a7\u30fc\u30cf\u306f\u6b21\u3005\u3068\u51e6\u7406\u3055\u308c\u307e\u3059\uff09 \u30d0\u30c3\u30c1\u30de\u30b7\u30f3\u306f\u9577\u3044\u9593\u666e\u901a\u306e\u4eba\u3067\u3057\u305f\u3002\u3044\u304f\u3064\u304b\u306e\u30a6\u30a7\u30fc\u30cf\uff08\u591a\u304f\u306e\u5834\u540813\uff09\u304c\u56de\u8ee2\u30ad\u30e3\u30ea\u30a2\u306b\u914d\u7f6e\u3055\u308c\u3001\u9ad8\u3044\u56de\u8ee2\u901f\u5ea6\uff08\u6700\u59271200 rpm\uff09\u304c\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u3092\u901a\u3063\u3066\u99c6\u52d5\u3055\u308c\u307e\u3059\u3002 200 mm\u30a6\u30a7\u30fc\u30cf\u306e\u5c0e\u5165\u306b\u3088\u308a\u3001\u5358\u4e00\u30ef\u30fc\u30d5\u30a1\u30fc\u30de\u30b7\u30f3\u304c\u9b45\u529b\u7684\u306b\u306a\u308a\u3001\u305d\u3053\u3067\u306f\u9759\u96fb\u30ad\u30e3\u30ea\u30a2\u306b\u5358\u4e00\u306e\u30a6\u30a7\u30fc\u30cf\u304c\u3042\u308a\u307e\u3057\u305f\u3002 \u30c1\u30e3\u30c3\u30af \uff09 \u4fdd\u6301\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u30d7\u30ed\u30bb\u30b9\u30b3\u30b9\u30c8\u306e\u7bc0\u7d04\u306b\u52a0\u3048\u3066\u3001\u30b7\u30f3\u30b0\u30eb\u30ef\u30fc\u30d5\u30a1\u30fc\u30de\u30b7\u30f3\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u4e0a\u3067\u3088\u308a\u5747\u4e00\u306a\u30c9\u30c3\u30d4\u30f3\u30b0\u3068\u3001\u500b\u3005\u306e\u30a6\u30a7\u30fc\u30cf\u30db\u30eb\u30c0\u30fc\u306e\u4f4e\u3044\u30b9\u30da\u30fc\u30b9\u8981\u4ef6\uff08\u6700\u592760\u00b0\uff09\u3068\u3088\u308a\u826f\u3044\u89d2\u5ea6\u7cbe\u5ea6\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 300 mm\u30a6\u30a7\u30fc\u30cf\u3067\u306e\u88fd\u9020\u306b\u4f7f\u7528\u3055\u308c\u308b\u30d0\u30c3\u30c1\u30b7\u30b9\u30c6\u30e0\u306f\u307b\u3068\u3093\u3069\u3042\u308a\u307e\u305b\u3093\u3002\u4e00\u65b9\u3067\u306f\u3001\u5fc5\u8981\u306a\u8010\u6027\u8981\u4ef6\u306b\u307b\u3068\u3093\u3069\u5230\u9054\u3067\u304d\u305a\u3001\u30b7\u30b9\u30c6\u30e0\u304c\u5927\u304d\u3059\u304e\u308b\uff08\u9ad8\u3059\u304e\u3066\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306b\u7acb\u3063\u3066\u3044\u308b\uff09\u305f\u3081\u3001\u307b\u3068\u3093\u3069\u30d0\u30c3\u30c1\u30b7\u30b9\u30c6\u30e0\u306f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u305b\u3093\u3002 [3] \u2191  Bernd Schmidt\u3001Klaus Wetzig\uff1a \u6750\u6599\u306e\u51e6\u7406\u3068\u5206\u6790\u306b\u304a\u3051\u308b\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0 \u3002 Springer\u30012012\u3001ISBN 3-211-99355-X\u3001 S.  74 \u3002   \u2191  Axcelis\u306f\u300115\u5e74\u9593\u306b\u308f\u305f\u3063\u3066300\u756a\u76ee\u306eGSD\/HE\u30b7\u30ea\u30fc\u30ba\u30a4\u30f3\u30d7\u30e9\u30f3\u30bf\u30fc\u30de\u30fc\u30af\u306e\u51fa\u8377\u3092\u795d\u3044\u307e\u3059\u3002 Axcelis Technologies\u300122\u30022011\u5e746\u6708\u3001 2020\u5e747\u670822\u65e5\u306b\u53d6\u5f97 \uff08\u30d7\u30ec\u30b9\u30ea\u30ea\u30fc\u30b9\uff09\u3002   \u2191 a b  Lis K. Nanver\u3001Egbert J. G. Goudena\uff1a \u30a4\u30aa\u30f3\u79fb\u690d \u3002\u306e\uff1a \u96fb\u6c17\u304a\u3088\u3073\u96fb\u5b50\u5de5\u5b66\u306e\u30ef\u30a4\u30ea\u30fc\u767e\u79d1\u4e8b\u5178 \u3002 American Cancer Society\u30011999\u3001ISBN 978-0-471-34608-1\u3001doi\uff1a 10.1002\/047134608X.W7021 \u3002   \u2191  \u30b5\u30df\u30fb\u30d5\u30e9\u30f3\u30b7\u30e9\uff1a \u30de\u30a4\u30af\u30ed\u30d5\u30a1\u30d6\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u7d39\u4ecb \u3002 John Wiley\uff06Sons\u30012010\u3001ISBN 978-1-119-99189-2\u3001 S.  177 \u3002   \u2191  \u30e1\u30eb\u30fb\u30b7\u30e5\u30ef\u30eb\u30c4\uff1a \u65b0\u3057\u3044\u6750\u6599\u3001\u30d7\u30ed\u30bb\u30b9\u3001\u304a\u3088\u3073\u65b9\u6cd5\u6280\u8853 \u3002 CRC Press\u30012010\u3001ISBN 978-1-4200-3934-4\u3001 S.  647\u2013649 \u3002   \u2191  \u30de\u30a4\u30b1\u30eb\u30fb\u30ca\u30b9\u30bf\u30b7\u3001\u30b8\u30a7\u30fc\u30e0\u30ba\u30fbW\u30fb\u30e1\u30a4\u30e4\u30fc\uff1a \u6750\u6599\u306e\u30a4\u30aa\u30f3\u79fb\u690d\u3068\u5408\u6210 \u3002 Springs\u30012006\u3001ISBN 978-3-540-45298-0\u3001 S.  214 \u3002         (adsbygoogle = window.adsbygoogle || []).push({});after-content-x4"},{"@context":"http:\/\/schema.org\/","@type":"BreadcrumbList","itemListElement":[{"@type":"ListItem","position":1,"item":{"@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/#breadcrumbitem","name":"Enzyklop\u00e4die"}},{"@type":"ListItem","position":2,"item":{"@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/11989#breadcrumbitem","name":"IONNIMPLANER  – \u30a6\u30a3\u30ad\u30da\u30c7\u30a3\u30a2\u30a6\u30a3\u30ad\u30da\u30c7\u30a3\u30a2"}}]}]