[{"@context":"http:\/\/schema.org\/","@type":"BlogPosting","@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/13979#BlogPosting","mainEntityOfPage":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/13979","headline":"\u30b5\u30d6\u30b9\u30ec\u30c3\u30b7\u30e7\u30eb\u30c9\u52b9\u679c-Wikipedia","name":"\u30b5\u30d6\u30b9\u30ec\u30c3\u30b7\u30e7\u30eb\u30c9\u52b9\u679c-Wikipedia","description":"before-content-x4 \u3088\u308a\u4f4e\u3044\u3057\u304d\u3044\u5024\u52b9\u679c \uff08 \u82f1\u8a9e \u4e9c\u9818\u57df\u52b9\u679c \uff09\u3057\u304d\u3044\u5024\u96fb\u5727\u306e\u4e0b\u306b\u53cd\u8ee2\u30c1\u30e3\u30cd\u30eb\u304c\u306a\u304f\u3066\u3082\u3001MOS\u30d5\u30a3\u30fc\u30eb\u30c9\u52b9\u679c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\uff08MOSFET\uff09\u3067\u306e\u89b3\u6e2c\u306b\u3064\u3044\u3066\u8aac\u660e\u3057\u307e\u3059 \u306e th \u5c0f\u3055\u306a\u6392\u6c34\u96fb\u6d41\u304c\u6d41\u308c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002 [\u521d\u3081] \u3053\u306e\u96fb\u6d41\u3082\u305d\u3046\u3067\u3059 \u30b5\u30d6\u30ef\u30d9\u30eb\u30d6\u30e9\u30f3\u30af \uff08 \u82f1\u8a9e \u30b5\u30d6\u95be\u5024\u6f0f\u308c\u96fb\u6d41 \uff09\u3053\u308c\u306f\u3001\u3053\u308c\u304c\u904b\u6cb3\u65b9\u5411\u306e\u671b\u307e\u3057\u304f\u306a\u3044\u96fb\u6d41\u306e\u6d41\u308c\u3067\u3042\u308b\u3053\u3068\u3092\u793a\u3057\u3066\u304a\u308a\u3001\u7d71\u5408\u3055\u308c\u305f\u56de\u8def\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb\u306e\u5897\u52a0\u306b\u3064\u306a\u304c\u308b\u3053\u3068\u3092\u793a\u3057\u3066\u3044\u307e\u3059\uff08\u4e00\u822c\u7684\u306b\u6f0f\u308c\u96fb\u6d41\u3082\u53c2\u7167\uff09\u3002 \u5e73\u9762\u6280\u8853\u306b\u304a\u3051\u308b\u30e9\u30c6\u30e9\u30ebN\u30c1\u30e3\u30cd\u30ebMOSFET\u306e\u6982\u7565\u69cb\u9020 after-content-x4 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    (adsbygoogle = window.adsbygoogle || []).push({});before-content-x4 \u3088\u308a\u4f4e\u3044\u3057\u304d\u3044\u5024\u52b9\u679c \uff08 \u82f1\u8a9e  \u4e9c\u9818\u57df\u52b9\u679c \uff09\u3057\u304d\u3044\u5024\u96fb\u5727\u306e\u4e0b\u306b\u53cd\u8ee2\u30c1\u30e3\u30cd\u30eb\u304c\u306a\u304f\u3066\u3082\u3001MOS\u30d5\u30a3\u30fc\u30eb\u30c9\u52b9\u679c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\uff08MOSFET\uff09\u3067\u306e\u89b3\u6e2c\u306b\u3064\u3044\u3066\u8aac\u660e\u3057\u307e\u3059 \u306e th \u5c0f\u3055\u306a\u6392\u6c34\u96fb\u6d41\u304c\u6d41\u308c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002 [\u521d\u3081] \u3053\u306e\u96fb\u6d41\u3082\u305d\u3046\u3067\u3059 \u30b5\u30d6\u30ef\u30d9\u30eb\u30d6\u30e9\u30f3\u30af \uff08 \u82f1\u8a9e  \u30b5\u30d6\u95be\u5024\u6f0f\u308c\u96fb\u6d41 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MOS\u30d5\u30a3\u30fc\u30eb\u30c9\u52b9\u679c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u7279\u5fb4\u7684\u306a\u30b5\u30a4\u30ba\u306f\u3001\u30b2\u30fc\u30c8\u306e\u9577\u3055\u3067\u3059\u3002 0.25 \u00b5m\u3092\u8d85\u3048\u308b\u30b2\u30fc\u30c8\u306e\u9577\u3055\u3092\u6301\u3064MOS\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3067\u5b9f\u73fe\u3055\u308c\u305f\u30c7\u30b8\u30bf\u30eb\u56de\u8def\u306b\u306f\u3001\u305d\u306e\u5f8c\u306e\u6f0f\u308c\u96fb\u6d41\u304c\u307b\u3068\u3093\u3069\u306a\u3044\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002 [4] 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\u52d5\u4f5c\u96fb\u5727\u3082\u3001MOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u69cb\u9020\u30b5\u30a4\u30ba\u304c\u6e1b\u5c11\u3059\u308b\u3068\u4f4e\u4e0b\u3057\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u7d71\u5408\u56de\u8def\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb\u306b\u5bfe\u3059\u308b\u52d5\u4f5c\u96fb\u5727\u306e\u5927\u304d\u306a\u5f71\u97ff\u306b\u57fa\u3065\u3044\u3066\u3044\u307e\u3059 [7] \u3002\u305f\u3060\u3057\u3001\u3053\u308c\u306b\u3088\u308a\u3001MOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u304c\u4f4e\u4e0b\u3057\u3001\u7d71\u5408\u56de\u8def\u306e\u6027\u80fd\u304c\u4f4e\u4e0b\u3057\u307e\u3059\u3002 [4] \u3053\u306e\u50be\u5411\u306b\u5bfe\u6297\u3059\u308b\u305f\u3081\u306b\u3001\u3057\u304d\u3044\u5024\u96fb\u5727\u3082 \u306e th{displaystyle u_ {mathrm {th}}} \u524a\u6e1b\u3002\u305f\u3060\u3057\u3001\u3053\u308c\u306f\u3001MOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u30c7\u30b8\u30bf\u30eb\u4fe1\u53f7\uff08NMOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\uff09\u307e\u305f\u306fVDD\uff08PMOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\uff09\u306e\u52a9\u3051\u3092\u501f\u308a\u3066\u5b8c\u5168\u306b\u30d6\u30ed\u30c3\u30af\u3067\u304d\u306a\u304f\u306a\u308b\u3053\u3068\u3092\u610f\u5473\u3057\u307e\u3059\u3002\u3053\u306e\u5834\u5408\u3001\u6392\u6c34\u3068\u30bd\u30fc\u30b9\u306e\u9593\u306e\u9818\u57df\u306f\u3053\u306e\u5834\u5408\u3067\u3059 \u5f31\u3044\u53cd\u8ee2 \u305d\u3057\u3066\u3001\u96fb\u754c\u3092\u4f5c\u6210\u3059\u308b\u3053\u3068\u306b\u3088\u308a\uff08\u3064\u307e\u308a\u3001\u30c9\u30ec\u30a4\u30f3\u30bd\u30fc\u30b9\u96fb\u5727 \u306e ds{displaystyle u_ {mathrm {ds}}} 0 v\u3088\u308a\u5927\u304d\u3044\uff09\u6392\u6c34\u3068\u6e90\u306e\u9593\u306b\u62e1\u6563\u96fb\u6d41\u304c\u3042\u308a\u307e\u3059\u3002\u3055\u3089\u306b\u3001\u71b1\u653e\u5c04\u306e\u5f71\u97ff\u3082\u5897\u52a0\u3057\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u52b9\u679c\u306b\u8d77\u56e0\u3059\u308b\u73fe\u5728\u306e\u6d41\u308c\u306f\u3001\u30b5\u30d6\u30b9\u30ec\u30c3\u30b7\u30e7\u30ca\u30eb\u6f0f\u308c\u96fb\u6d41\u3068\u3057\u3066\u306e\u30c7\u30b8\u30bf\u30eb\u56de\u8def\u3067\u3059\u3002 \u30b5\u30d6\u95be\u5024\u6f0f\u308c\u96fb\u6d41 \uff09\uff09 \u79c1 sub{displaystyle i_ {mathrm {sub}}} \u5c02\u7528\u3002 \u3057\u304d\u3044\u5024\u96fb\u5727 \u306e th{displaystyle u_ {mathrm {th}}} \u3002\u3053\u308c\u304c\u4f4e\u3044\u307b\u3069\u3001\u5f31\u3044\u53cd\u8ee2\u5c64\u5185\u306e\u904a\u96e2\u8ca0\u8377\u30ad\u30e3\u30ea\u30a2\u306e\u6570\u304c\u5927\u304d\u304f\u306a\u308a\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u901a\u8def\u3067\u4e8b\u524d\u306b\u30c6\u30f3\u30bb\u30f3\u30b9\u3055\u308c\u305f\u30c0\u30a4\u30aa\u30fc\u30c9\u306e\u96fb\u6d41\u306e\u6d41\u308c\u306b\u5339\u6575\u3059\u308b\u62e1\u6563\u96fb\u6d41\u304c\u6307\u6570\u95a2\u6570\u7684\u306b\u5897\u52a0\u3057\u307e\u3059\u3002\u3057\u305f\u304c\u3063\u3066\u3001\u5207\u65ad\u9818\u57df\u306e\u901a\u5e38\u306e\u65b9\u7a0b\u5f0f\u3092\u4f7f\u7528\u3057\u305f\u30c9\u30ec\u30f3\u96fb\u6d41\u306e\u8a08\u7b97\u306f\u3001\u3082\u306f\u3084\u6b63\u3057\u304f\u3042\u308a\u307e\u305b\u3093\u3002 \u79c1 s \u306e b {displaystyle i_ {sub}} \u3067\u6c7a\u5b9a\u3067\u304d\u307e\u3059\uff1a \u79c1 sub= k WeffLeff\uff08 1\u2212e\u2212Vds\u03d5T\uff09\uff09 eVgs\u2212Vth\u03d5Tsth{DISPLAYSLAYSLAYSTYLE IT SUB}} = k, {rm {W_ {rm {rm {rom {rm {eF}}}}}}}, left (1-MathRM {e}} {mathrm {mathrm}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}. HI _ {Mathrm {e} {e} {e} {e} {rm {g {g {g}}}}}}}}}}}}}, s_ {rm {rm {th}, s_}. \u3068 k = m 0\u03d5 T2NDq\u03f5Si2\u03d5sub{displaystyle k = mu _ {matrlm {0}} {{2}\u3001{{sqrt {}}} q\u3001epsilon {{}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}}} \u6e29\u5ea6\u96fb\u5727 \u03d5 T= kBTq{displaystyle phi _ {mathrm {t}} = {frac {k_ {mathrm {b}}\u3001t} {q}}}} \u30d5\u30a9\u30fc\u30df\u30e5\u30e9\u30b5\u30a4\u30f3\u306e\u610f\u5473\uff1a \u6709\u52b9\u306a\u30b2\u30fc\u30c8\u9577 l eff{displaystyle l_ {mathrm {eff}}} \u6709\u52b9\u306a\u30b2\u30fc\u30c8\u5e45\u3068\u540c\u69d8\u306b \u306e eff{displaystyle w_ {mathrm {eff}}} \u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u7269\u7406\u7684\u5bf8\u6cd5\u3088\u308a\u3082\u5c11\u306a\u3044\u3002\u524a\u6e1b\u306f\u3001\u30b2\u30fc\u30c8\u306e\u9577\u3055\u306eMOS\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3067\u306f\u3001\u3044\u308f\u3086\u308b\u77ed\u3044\u30c1\u30e3\u30cd\u30eb\u52b9\u679c\u306b\u57fa\u3065\u3044\u3066\u3044\u307e\u3059 l {displaystyle l} 0.25 \u00b5m\u672a\u6e80\u3067\u767a\u751f\u3057\u307e\u3059\u3002 \u30bd\u30ea\u30c3\u30c9\u30c9\u30ec\u30f3\u3001\u30bd\u30fc\u30b9\u3001\u30d0\u30eb\u30af\u5fdc\u529b\u306e\u30c9\u30ec\u30a4\u30f3\u96fb\u6d41\u30b2\u30fc\u30c8\u96fb\u5727\u7279\u6027\u306f\u3001\u5bfe\u6570\u7dda\u5f62\u6319\u52d5\u306b\u307b\u307c\u5bfe\u5fdc\u3057\u307e\u3059\u3002\u6025\u52fe\u914d\u3001\u3059\u306a\u308f\u3061\u3001\u5bfe\u6570\u6392\u51fa\u96fb\u6d41\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u306e\u30b9\u30c8\u30ec\u30fc\u30c8\u306e\u767b\u5c71\u306f\u305d\u308c\u3067\u3059 subjacore \uff08Engl\u3002 \u30b5\u30d6\u5c65\u6b74\u52fe\u914d \uff09\u3002 \u3057\u305f\u304c\u3063\u3066\u3001\u305d\u306e\u5f8c\u306e\u523a\u6fc0\u306f\u3001\u4f4e\u3044\u6295\u7403\u30b9\u30c8\u30ed\u30fc\u30af\uff08\u82f1\u8a9e\uff09\u306e\u76f8\u4e92\u7684\u306a\u3082\u306e\u3067\u3059\u3002 \u30b5\u30d6\u30b9\u30ec\u30c3\u30b8\u30b9\u30a4\u30f3\u30b0 \u3001 s s-th \uff09\u3001\u3053\u308c\u306f\u6b21\u306e\u3088\u3046\u306b\u8a08\u7b97\u3055\u308c\u307e\u3059\u3002 [8] s s\u2212th= ln \u2061 \uff08 \u5341 \uff09\uff09 kTq\uff08 1+CdCox\uff09\uff09 {displaystyle s_ {s-th} = ln\uff0810\uff09{kt over q}\u5de6\uff081+ {c_ {d} over c_ {ox}}\u53f3\uff09} \u8ca7\u56f0\u30be\u30fc\u30f3\u306e\u5bb9\u91cf\u3092\u5099\u3048\u3066\u3044\u307e\u3059 c d {displaystyle c_ {d}} \u3001\u9178\u5316\u30b2\u30fc\u30c8\u5bb9\u91cf c o \u30d0\u30c4 {displaystyle c_ {ox}} \u305d\u3057\u3066\u71b1\u96fb\u5727 kTQ {displaystyle {kt over q}} \u3002 \u5f93\u6765\u306e\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u5c0f\u3055\u306a\u4f4e\u3044\u3057\u304d\u3044\u5024\u306f\u3001\u6761\u4ef6\u306e\u4e0b\u306b\u3042\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059 Cd\u2192 0 {displaystyle textStyle {c_ {d}} rightArrow 0} \u304a\u3088\u3073\u307e\u305f\u306f Cox\u2192 \u221e {displaystyle textStyle {c_ {ox}} rightarrow infty} \u898b\u3064\u304b\u3063\u305f\u3002\u7d50\u679c\u3067\u3059 s s  &#8211;  t h \u3001 \u5206 = ln \u2061 \uff08 \u5341 \uff09\uff09 kTQ {displaystyle s_ {s-th\u3001min} = ln\uff0810\uff09{kt over q}}} \uff08\u71b1\u578b\u3068\u3082\u547c\u3070\u308c\u307e\u3059\uff09\u3002\u5ba4\u6e29\u306710\u5e74\u3042\u305f\u308a\u7d0460\u30df\u30ea\u30dc\u30eb\u30c8\u306b\u76f8\u5f53\u3057\u307e\u3059\uff08\u30b2\u30fc\u30c8\u96fb\u5727\u5909\u5316\u306f10\u500d\uff09\u3002\u5ba4\u6e29\u3067\u306e\u30e2\u30fc\u30bb\u30c3\u30c8\u306e\u6e1b\u5c11\u306e\u5fae\u5999\u306a\u5909\u5316\u306e\u5178\u578b\u7684\u306a\u5024\u306f\u300110\u5e74\u3042\u305f\u308a\u7d0470\u30df\u30ea\u30dc\u30eb\u30c8\u3067\u3059\u3002\u3064\u307e\u308a\u3001\u77ed\u3044\u30c1\u30e3\u30cd\u30eb\u52b9\u679c\u306e\u305f\u3081\u306b\u5c11\u3057\u5c11\u306a\u3044\u3067\u3059\u3002 [9] \u5927\u898f\u6a21\u306a\u30b5\u30d6\u30b8\u30e5\u30ac\u30fc\u30c8\u30b9\u30c6\u30a2\u3092\u6301\u3064\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3001\u72b6\u614b\uff08\u4f4e\u96fb\u6d41\uff09\u30681\u3064\u306e\u72b6\u614b\uff08\u9ad8\u96fb\u6d41\uff09\u306e\u9593\u306e\u9077\u79fb\u304c\u3088\u308a\u901f\u304f\u306a\u308a\u307e\u3059\u3002 S.M.\u516d\uff1a \u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u3002 \u7b2c2\u7248\u200b\u200b\u3002 Wiley\uff06Sons\u30012002\u3001ISBN 0-471-33372-7\u3002 T. A. fjeldly\u3001M\u3002Shur\uff1a \u3057\u304d\u3044\u5024\u96fb\u5727\u30e2\u30c7\u30ea\u30f3\u30b0\u3068\u3001\u77ed\u3044\u30c1\u30e3\u30cd\u30ebMOSFET\u306e\u64cd\u4f5c\u306e\u30b5\u30d6\u30b9\u30ec\u30c3\u30b7\u30e7\u30eb\u30c9\u30ec\u30b8\u30fc\u30e0\u3002 \u306e\uff1a \u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u3067\u306eIEEE\u30c8\u30e9\u30f3\u30b6\u30af\u30b7\u30e7\u30f3\u3002 \u3044\u3044\u3048\u3002 40\u30011993\u3001pp\u3002137\u2013145\u3002 \u2191  Ulrich Tietze\u3001Christoph Schenk\u3001Eberhard Gamm\uff1a \u534a\u5c0e\u4f53\u56de\u8def\u6280\u8853 \u3002 11.\u3001\u5b8c\u5168\u306b\u65b0\u3057\u3044\u3002\u3068\u5e83\u544a\u3002\u7248\u3002 Springer\u3001Berlin\/ Heidelberg 1999\u3001ISBN 3-540-64192-0\u3001 S.  223 \u3002   \u2191  B. van Zeghbroeck\uff1a 3.4.2\u71b1\u653e\u51fa\u3002 \u306e\uff1a \u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u539f\u7406\u3002 2004\u5e74\u3001 2020\u5e747\u67084\u65e5\u306b\u30a2\u30af\u30bb\u30b9 \uff08\u82f1\u8a9e\uff09\u3002   \u2191  B. van Zeghbroeck\uff1a 3.2.2\u30d5\u30e9\u30c3\u30c8\u30d0\u30f3\u30c9\u56f3\u3068\u7d44\u307f\u8fbc\u307f\u306e\u30dd\u30c6\u30f3\u30b7\u30e3\u30eb\u3002 \u306e\uff1a \u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u539f\u7406\u3002 2004\u5e74\u3001 2020\u5e747\u67084\u65e5\u306b\u30a2\u30af\u30bb\u30b9 \uff08\u82f1\u8a9e\uff09\u3002   \u2191 a b  N.\u30a6\u30a7\u30b9\u30c8\u3001D\u3002\u30cf\u30ea\u30b9\uff1a CMOS VLSI\u8a2d\u8a08 &#8211; \u56de\u8def\u3068\u30b7\u30b9\u30c6\u30e0\u306e\u89b3\u70b9\u3002 3.\u30a8\u30c7\u30a3\u30b7\u30e7\u30f3\u3002 Addison-Wesley\u30012005\u3001ISBN 0-321-14901-7\u3002  \u2191  Y. S.\u30dc\u30eb\u30ab\u30fc\uff1a Gigascale\u7d71\u5408\u306e\u305f\u3081\u306eVLSI\u8a2d\u8a08\u4e0a\u306e\u8ab2\u984c\u3002 \u306e\uff1a VLSI\u30c7\u30b6\u30a4\u30f3\u306b\u95a2\u3059\u308b\u7b2c18\u56de\u4f1a\u8b70 \u3001\u30b3\u30eb\u30ab\u30bf\u3001\u30a4\u30f3\u30c9\u30012005\u5e74  \u2191  ITRS  &#8211;  Semiconductors 2006\u30a2\u30c3\u30d7\u30c7\u30fc\u30c8\u306e\u305f\u3081\u306e\u56fd\u969b\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u30ed\u30fc\u30c9\u30de\u30c3\u30d7\u3002 \u30c6\u30af\u30cb\u30ab\u30eb\u30ec\u30dd\u30fc\u30c8\u30012006\u5e74\u3002  \u2191  Dimitrios Soudris\u3001Christian Piguet\u3001Costas Goutis\uff08\u7de8\uff09\uff1a \u4f4e\u96fb\u529b\u7528\u306eCMOS\u30b5\u30fc\u30ad\u30c3\u30c8\u306e\u8a2d\u8a08 \u3002 Springer\u3001Berlin 2002\u3001ISBN 1-4020-7234-1\u3002   \u2191  \u30b5\u30a4\u30e2\u30f3\u30fbM\u30fb\u30bc\u3001\u30af\u30a9\u30c3\u30af\u30fbK\u30fbNG\uff1a \u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u7269\u7406\u5b66 \u3002 3.\u30a8\u30c7\u30a3\u30b7\u30e7\u30f3\u3002\u30b8\u30e7\u30f3\u30fb\u30ef\u30a4\u30ea\u30fc\uff06\u30b5\u30f3\u30ba\u3001\u30db\u30fc\u30dc\u30fc\u30b1\u30f3NJ 2006\u3001ISBN 0-471-14323-5\u3001 S.  315 \u3002  \u3002  \u2191  C.\u8a8d\u8a3cu\u3002 a\u3002\uff1a \u5b8c\u5168\u306b\u67af\u6e07\u3057\u305fTRI-GATE\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3001\u81ea\u5df1\u6574\u5408\u63a5\u70b9\u3001\u9ad8\u5bc6\u5ea6MIM\u30b3\u30f3\u30c7\u30f3\u30b5\u3092\u5099\u3048\u305f22nm\u306e\u9ad8\u6027\u80fd\u304a\u3088\u3073\u4f4e\u96fb\u529bCMOS\u30c6\u30af\u30ce\u30ed\u30b8\u30fc \u3002\u306e\uff1a VLSI\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306b\u95a2\u3059\u308b2012\u30b7\u30f3\u30dd\u30b8\u30a6\u30e0\uff08VLSIT\uff09 \u3002 2012\u3001ISBN 978-1-4673-0847-2\u3001 S.  131\u2013132 \u3001doi\uff1a 10.1109\/vlsit.2012.6242496 \u3002        (adsbygoogle = window.adsbygoogle || []).push({});after-content-x4"},{"@context":"http:\/\/schema.org\/","@type":"BreadcrumbList","itemListElement":[{"@type":"ListItem","position":1,"item":{"@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/#breadcrumbitem","name":"Enzyklop\u00e4die"}},{"@type":"ListItem","position":2,"item":{"@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/13979#breadcrumbitem","name":"\u30b5\u30d6\u30b9\u30ec\u30c3\u30b7\u30e7\u30eb\u30c9\u52b9\u679c-Wikipedia"}}]}]