[{"@context":"http:\/\/schema.org\/","@type":"BlogPosting","@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/4249#BlogPosting","mainEntityOfPage":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/4249","headline":"Vatuumthik -Wikipedia","name":"Vatuumthik -Wikipedia","description":"before-content-x4 \u5b9f\u969b\u3001\u5916\u6c17\u5727\u304c\u62bc\u3057\u307e\u3059 \u30de\u30b0\u30c7\u30d6\u30eb\u30af\u534a\u7403 \u4e00\u7dd2\u306b\uff1aa\uff09\u7a7a\u6c17\u3067\u6e80\u305f\u3055\u308c\u305f\u534a\u5206\u306e\u30dc\u30fc\u30eb\u3001b\uff09\u30a8\u30a2\u30ec\u30b9\u534a\u7403\u30011\u756a\u76ee\u306e\u30cf\u30f3\u30c9\u30eb\u30012\u756a\u76ee\u306e\u6c17\u5bc6\u30b7\u30fc\u30ea\u30f3\u30b0\u30013\u3002\u30de\u30b0\u30c7\u30d6\u30eb\u30af\u534a\u7403\u30014\u3002\u7a7a\u6c17\u5727\u30015\u756a\u76ee\u306e\u771f\u7a7a \u5b66\u6821\u30c6\u30b9\u30c8\u7528\u306e\u30d4\u30b9\u30c8\u30f3\u771f\u7a7a\u30dd\u30f3\u30d7\u4ed8\u304d\u30ac\u30e9\u30b9\u30d9\u30eb \u771f\u7a7a\u6280\u8853 \u771f\u7a7a\u306e\u751f\u7523\u3001\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3001\u6e2c\u5b9a\u306e\u305f\u3081\u306e\u30c7\u30d0\u30a4\u30b9\u3068\u624b\u9806\u3092\u6271\u3063\u3066\u3044\u307e\u3059\u3002 [\u521d\u3081] [2] after-content-x4 \u771f\u7a7a\u306e\u7814\u7a76\u3068\u6280\u8853\u751f\u7523\u306f17\u4e16\u7d00\u306b\u59cb\u307e\u308a\u307e\u3057\u305f\u3002\u4eca\u65e5\u306e\u771f\u7a7a\u6280\u8853\u306f\u3001\u6b21\u306e\u3088\u3046\u306a\u696d\u754c\u3084\u7814\u7a76\u306e\u591a\u304f\u306e\u5206\u91ce\u3067\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002 B.\u6750\u6599\u306e\u6cbb\u7642\u307e\u305f\u306f\u98df\u54c1\u7523\u696d\u306e\u53d6\u308a\u6271\u3044\u306e\u305f\u3081\u306e\u751f\u7523\u304a\u3088\u3073\u88fd\u9020\u6280\u8853\u306b\u304a\u3044\u3066\u3001\u533b\u7642\u6280\u8853\u3001\u7269\u7406\u5b66\u3001\u5316\u5b66\u3002 [3] [4] \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u5fdc\u3058\u3066\u3001\u7d041000 hPa\u306e\u5927\u6c17\u306e\u7a7a\u6c17\u5727\u306810\u306e\u6975\u7aef\u306a\u8d85\u9ad8\u771f\u7a7a\u306e\u9593\u306e\u7279\u5b9a\u306e\u771f\u7a7a\u9762\u7a4d -14 HPA\u4f7f\u7528\u3002 after-content-x4 \u771f\u7a7a\u6280\u8853\u3078\u306e\u3044\u304f\u3064\u304b\u306e\u91cd\u8981\u306a\u8ca2\u732e\u306fu\u3092\u4f5c\u308a\u307e\u3057\u305f\u3002\u7269\u7406\u5b66\u8005\u306e\u30aa\u30c3\u30c8\u30fc\u30fb\u30d5\u30a9\u30f3\u30fb\u30b0\u30a8\u30ea\u30c3\u30af\u3001\u30f4\u30a9\u30eb\u30d5\u30ac\u30f3\u30b0\u30fb\u30b2\u30fc\u30c7\u3001\u30de\u30eb\u30c1\u30a7\u30ed\u30fb\u30d4\u30e9\u30cb\u3001\u30eb\u30c9\u30eb\u30d5\u30fb\u30b8\u30e3\u30b1\u30eb\u3001\u30eb\u30a4\u30b9\u30fb\u30db\u30fc\u30eb\uff08\u30d0\u30ea\u30a2\u30f3\uff09\u3002","datePublished":"2020-03-15","dateModified":"2020-03-15","author":{"@type":"Person","@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/author\/lordneo#Person","name":"lordneo","url":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/author\/lordneo","image":{"@type":"ImageObject","@id":"https:\/\/secure.gravatar.com\/avatar\/44a4cee54c4c053e967fe3e7d054edd4?s=96&d=mm&r=g","url":"https:\/\/secure.gravatar.com\/avatar\/44a4cee54c4c053e967fe3e7d054edd4?s=96&d=mm&r=g","height":96,"width":96}},"publisher":{"@type":"Organization","name":"Enzyklop\u00e4die","logo":{"@type":"ImageObject","@id":"https:\/\/wiki.edu.vn\/wiki4\/wp-content\/uploads\/2023\/08\/download.jpg","url":"https:\/\/wiki.edu.vn\/wiki4\/wp-content\/uploads\/2023\/08\/download.jpg","width":600,"height":60}},"image":{"@type":"ImageObject","@id":"https:\/\/upload.wikimedia.org\/wikipedia\/commons\/thumb\/2\/2b\/Voyage_in_Space_page065.png\/240px-Voyage_in_Space_page065.png","url":"https:\/\/upload.wikimedia.org\/wikipedia\/commons\/thumb\/2\/2b\/Voyage_in_Space_page065.png\/240px-Voyage_in_Space_page065.png","height":"146","width":"240"},"url":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/4249","wordCount":3581,"articleBody":"     (adsbygoogle = window.adsbygoogle || []).push({});before-content-x4   \u5b9f\u969b\u3001\u5916\u6c17\u5727\u304c\u62bc\u3057\u307e\u3059 \u30de\u30b0\u30c7\u30d6\u30eb\u30af\u534a\u7403 \u4e00\u7dd2\u306b\uff1aa\uff09\u7a7a\u6c17\u3067\u6e80\u305f\u3055\u308c\u305f\u534a\u5206\u306e\u30dc\u30fc\u30eb\u3001b\uff09\u30a8\u30a2\u30ec\u30b9\u534a\u7403\u30011\u756a\u76ee\u306e\u30cf\u30f3\u30c9\u30eb\u30012\u756a\u76ee\u306e\u6c17\u5bc6\u30b7\u30fc\u30ea\u30f3\u30b0\u30013\u3002\u30de\u30b0\u30c7\u30d6\u30eb\u30af\u534a\u7403\u30014\u3002\u7a7a\u6c17\u5727\u30015\u756a\u76ee\u306e\u771f\u7a7a  \u5b66\u6821\u30c6\u30b9\u30c8\u7528\u306e\u30d4\u30b9\u30c8\u30f3\u771f\u7a7a\u30dd\u30f3\u30d7\u4ed8\u304d\u30ac\u30e9\u30b9\u30d9\u30eb  \u771f\u7a7a\u6280\u8853 \u771f\u7a7a\u306e\u751f\u7523\u3001\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3001\u6e2c\u5b9a\u306e\u305f\u3081\u306e\u30c7\u30d0\u30a4\u30b9\u3068\u624b\u9806\u3092\u6271\u3063\u3066\u3044\u307e\u3059\u3002 [\u521d\u3081] [2]        (adsbygoogle = window.adsbygoogle || []).push({});after-content-x4\u771f\u7a7a\u306e\u7814\u7a76\u3068\u6280\u8853\u751f\u7523\u306f17\u4e16\u7d00\u306b\u59cb\u307e\u308a\u307e\u3057\u305f\u3002\u4eca\u65e5\u306e\u771f\u7a7a\u6280\u8853\u306f\u3001\u6b21\u306e\u3088\u3046\u306a\u696d\u754c\u3084\u7814\u7a76\u306e\u591a\u304f\u306e\u5206\u91ce\u3067\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002 B.\u6750\u6599\u306e\u6cbb\u7642\u307e\u305f\u306f\u98df\u54c1\u7523\u696d\u306e\u53d6\u308a\u6271\u3044\u306e\u305f\u3081\u306e\u751f\u7523\u304a\u3088\u3073\u88fd\u9020\u6280\u8853\u306b\u304a\u3044\u3066\u3001\u533b\u7642\u6280\u8853\u3001\u7269\u7406\u5b66\u3001\u5316\u5b66\u3002 [3] [4] \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u5fdc\u3058\u3066\u3001\u7d041000 hPa\u306e\u5927\u6c17\u306e\u7a7a\u6c17\u5727\u306810\u306e\u6975\u7aef\u306a\u8d85\u9ad8\u771f\u7a7a\u306e\u9593\u306e\u7279\u5b9a\u306e\u771f\u7a7a\u9762\u7a4d -14 HPA\u4f7f\u7528\u3002        (adsbygoogle = window.adsbygoogle || []).push({});after-content-x4\u771f\u7a7a\u6280\u8853\u3078\u306e\u3044\u304f\u3064\u304b\u306e\u91cd\u8981\u306a\u8ca2\u732e\u306fu\u3092\u4f5c\u308a\u307e\u3057\u305f\u3002\u7269\u7406\u5b66\u8005\u306e\u30aa\u30c3\u30c8\u30fc\u30fb\u30d5\u30a9\u30f3\u30fb\u30b0\u30a8\u30ea\u30c3\u30af\u3001\u30f4\u30a9\u30eb\u30d5\u30ac\u30f3\u30b0\u30fb\u30b2\u30fc\u30c7\u3001\u30de\u30eb\u30c1\u30a7\u30ed\u30fb\u30d4\u30e9\u30cb\u3001\u30eb\u30c9\u30eb\u30d5\u30fb\u30b8\u30e3\u30b1\u30eb\u3001\u30eb\u30a4\u30b9\u30fb\u30db\u30fc\u30eb\uff08\u30d0\u30ea\u30a2\u30f3\uff09\u3002 [5] \u771f\u7a7a\u6280\u8853\u306f\u3001\u7269\u8cea\u79d1\u5b66\u3001\u8868\u9762\u7269\u7406\u5b66\uff08\u624b\u9806CVD\u3001PVD\u306a\u3069\uff09\u3001\u8584\u5c64\u6280\u8853\u3001\u30de\u30a4\u30af\u30ed\u304a\u3088\u3073\u30ca\u30ce\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u6280\u8853\u306e\u5883\u754c\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002\u5f7c\u5973\u306f\u307e\u305f\u3001\u5b87\u5b99\u65c5\u884c\u3067\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059 [6] \u3001\u98df\u54c1\u7523\u696d\uff08\u51b7\u51cd\u5eab\uff09\u3001\u5bb6\u5ead\u5185\uff08\u771f\u7a7a\u30af\u30ea\u30fc\u30ca\u30fc\u3001\u6383\u9664\u6a5f\u3001\u771f\u7a7a\u30c7\u30d0\u30a4\u30b9\uff09\u306a\u3069\u3002 \u4ee5\u524d\u306b\u30ac\u30b9\u3067\u57cb\u3081\u3089\u308c\u305f\u30dc\u30ea\u30e5\u30fc\u30e0\u3067\u771f\u7a7a\u3092\u751f\u6210\u3059\u308b\u306b\u306f\u3001\u30ac\u30b9\uff08\u904b\u52d5\u69d8\u5f0f\u306e\u30b2\u30b9\u30c8\u7406\u8ad6\u3082\u53c2\u7167\uff09\u3092\u30dc\u30ea\u30e5\u30fc\u30e0\u304b\u3089\u9664\u53bb\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u6a5f\u80fd\u539f\u7406\u306b\u5f93\u3063\u30662\u3064\u306e\u30b0\u30eb\u30fc\u30d7\u306b\u5206\u3051\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u771f\u7a7a\u30dd\u30f3\u30d7\u3092\u4f7f\u7528\u3057\u3066\u884c\u308f\u308c\u307e\u3059\u3002\u5727\u7e2e\u30dd\u30f3\u30d7\u306f\u3001\u5909\u4f4d\u307e\u305f\u306f\u30d1\u30eb\u30b9\u9001\u4fe1\u306b\u3088\u308a\u4f53\u7a4d\u3092\u9664\u53bb\u3057\u307e\u3059\u3002\u5225\u306e\u30aa\u30d7\u30b7\u30e7\u30f3\u306f\u3001\u30dc\u30ea\u30e5\u30fc\u30e0\u306e\u58c1\u306e\u30ac\u30b9\u3092\u51dd\u7e2e\u307e\u305f\u306f\u5316\u5b66\u7684\u306b\u6392\u51fa\u3059\u308b\u3053\u3068\u3067\u3059\u3002 \u6b21\u306e\u5370\u5237\u9818\u57df\u306f\u3001\u771f\u7a7a\u6280\u8853\u3067\u533a\u5225\u3055\u308c\u3066\u3044\u307e\u3059\u3002 [7]        (adsbygoogle = window.adsbygoogle || []).push({});after-content-x4\u7c97\u7a7a\u306e\u771f\u7a7a\uff1a1013 HPA\u304b\u3089\u6700\u59271 hPa\u3001 \u7d30\u304b\u3044\u771f\u7a7a\uff1a1 HPA\u304b\u308910\u307e\u3067 -3 HPA\u3001 Hochvakuum\uff1a10 -3 HPA BIS 10 -7 HPA\u3001 ultrahochvakuum\uff08UHV\uff09\uff1a10\u672a\u6e80 -7 HPA\u3002 \u300c\u7a76\u6975\u306e\u771f\u7a7a\u300d\uff1a [8] 10\u672a\u6e80 -9 HPA\u3002 \u771f\u7a7a\u30dd\u30f3\u30d7\u306e\u9078\u629e\u306f\u3001\u9054\u6210\u3059\u308b\u5727\u529b\u3068\u9069\u7528\u9818\u57df\u306b\u4f9d\u5b58\u3057\u307e\u3059\u3002\u9ad8\u3044\u771f\u7a7a\u306e\u5834\u5408\u3001\u4e88\u5099\u7684\u306a\u771f\u7a7a\u3068\u9ad8\u771f\u7a7a\u30dd\u30f3\u30d7\u3092\u5099\u3048\u305f\u30de\u30eb\u30c1\u30b9\u30c6\u30fc\u30b8\u30d7\u30ed\u30bb\u30b9\u304c\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002 [9] \u73fe\u5728\u306e\u8a18\u9332\uff082020\u5e74\u73fe\u5728\uff09\u306f6.7\u00d710\u3067\u3059 -17 mbar\u3002 [\u5341] \u30dd\u30f3\u30d7\u3001\u30b7\u30b9\u30c6\u30e0\u3001\u30b7\u30b9\u30c6\u30e0\u306e\u3088\u304f\u77e5\u3089\u308c\u3066\u3044\u308b\u30e1\u30fc\u30ab\u30fc\uff08\u7279\u306bUHV\u7528\uff09\u306b\u306fB. Edwards\u3001Leybold\u3001Pfeiffer\u3001Pink\u3001\u307e\u305f\u306f\u30e1\u30fc\u30ab\u30fc\u306f\u3001\u771f\u7a7a\u6280\u8853\u3068\u3001\u6b21\u306e\u3088\u3046\u306a\u534a\u5c0e\u4f53\u696d\u754c\u5411\u3051\u306e\u57fa\u672c\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u958b\u767a\u3057\u307e\u3059\u3002 B. Amec\u3001Axitron\u3001Tokyo Electron\u3001Veeco\u3001Ulvac\u306a\u3069\u3002 \u771f\u7a7a\u306f\u5727\u529b\u3092\u6e2c\u5b9a\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u3001\u305d\u308c\u305e\u308c\u306b\u7279\u5fb4\u7684\u306a\u6e2c\u5b9a\u7bc4\u56f2\u304c\u3042\u308a\u3001\u771f\u7a7a\u6280\u8853\u306e\u5927\u304d\u306a\u5727\u529b\u9762\u7a4d\u304c\u539f\u56e0\u3067\u7dcf\u9762\u7a4d\u306e\u4e00\u90e8\u306e\u307f\u3092\u30ab\u30d0\u30fc\u3057\u307e\u3059\u3002\u5727\u529b\u6e2c\u5b9a\u306f\u30ac\u30b9\u4f9d\u5b58\u6027\u306b\u306a\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002 \u76f4\u63a5\u307e\u305f\u306f\u7d76\u5bfe\u7684\u306a\u771f\u7a7a\u6e2c\u5b9a\u6e2c\u5b9a\u306f\u3001\u9818\u57df\u306b\u4f5c\u7528\u3059\u308b\u30d1\u30ef\u30fc\u3068\u3057\u3066\u5727\u529b\u3092\u6e2c\u5b9a\u3057\u307e\u3059\u3002\u76f4\u63a5\u5727\u529b\u6e2c\u5b9a\u306f\u3001\u7c97\u3044\u771f\u7a7a\u9818\u57df\u3067\u3057\u304b\u6bd4\u8f03\u7684\u6b63\u78ba\u3067\u3059\u3002\u9593\u63a5\u5727\u529b\u6e2c\u5b9a\u306e\u5834\u5408\u3001\u5727\u529b\u306f\u5bc6\u5ea6\u3001\u3057\u305f\u304c\u3063\u3066\u5727\u529b\u4f9d\u5b58\u6027\u306e\u7279\u6027\u306e\u95a2\u6570\u3068\u3057\u3066\u6c7a\u5b9a\u3055\u308c\u307e\u3059\u3002\u5727\u529b\u304c\u4f4e\u3044\u6e2c\u5b9a\u306e\u4e0d\u78ba\u5b9f\u6027\u3067\u6c7a\u5b9a\u3055\u308c\u308b\u5834\u5408\u3001\u5fae\u7d30\u306a\u771f\u7a7a\u9818\u57df\u3067\u306f\u3059\u3067\u306b\u9ad8\u3044\u52aa\u529b\u304c\u5fc5\u8981\u3067\u3059\u3002 \u771f\u7a7a\u30d7\u30ed\u30bb\u30b9\u306e\u5834\u5408\u3001\u5fc5\u8981\u306b\u5fdc\u3058\u3066\u5727\u529b\u3092\u7d99\u7d9a\u7684\u306b\u30c1\u30a7\u30c3\u30af\u3057\u3066\u898f\u5236\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u6e2c\u5b9a\u5024\u306f\u9001\u4fe1\u3055\u308c\u3001\u5236\u5fa1\u304a\u3088\u3073\u5207\u308a\u66ff\u3048\u30b9\u30c6\u30fc\u30b7\u30e7\u30f3\u306b\u767b\u9332\u3055\u308c\u307e\u3059\u3002\u3053\u306e\u5236\u5fa1\u3068\u898f\u5236\u306f\u3001\u7279\u5b9a\u306e\u9818\u57df\u306e\u771f\u7a7a\u30b7\u30b9\u30c6\u30e0\u306e\u5727\u529b\u3092\u7dad\u6301\u3057\u307e\u3059\u3002 Table of Contents\u30b9\u30da\u30b7\u30e3\u30ea\u30b9\u30c8\u8a18\u4e8b [ \u7de8\u96c6 | \u30bd\u30fc\u30b9\u30c6\u30ad\u30b9\u30c8\u3092\u7de8\u96c6\u3057\u307e\u3059 ] \u30b9\u30da\u30b7\u30e3\u30ea\u30b9\u30c8\u306e\u672c [ \u7de8\u96c6 | \u30bd\u30fc\u30b9\u30c6\u30ad\u30b9\u30c8\u3092\u7de8\u96c6\u3057\u307e\u3059 ] \u30af\u30e9\u30b7\u30c3\u30af\u3001\u6b74\u53f2\u3001\u4eba\u6c17 [ \u7de8\u96c6 | \u30bd\u30fc\u30b9\u30c6\u30ad\u30b9\u30c8\u3092\u7de8\u96c6\u3057\u307e\u3059 ] \u4ed6\u306e\u5c02\u9580\u306e\u30c9\u30a2 [ \u7de8\u96c6 | \u30bd\u30fc\u30b9\u30c6\u30ad\u30b9\u30c8\u3092\u7de8\u96c6\u3057\u307e\u3059 ] \u30b8\u30e3\u30fc\u30ca\u30eb\u3068\u96d1\u8a8c [ \u7de8\u96c6 | \u30bd\u30fc\u30b9\u30c6\u30ad\u30b9\u30c8\u3092\u7de8\u96c6\u3057\u307e\u3059 ] \u30b9\u30da\u30b7\u30e3\u30ea\u30b9\u30c8\u8a18\u4e8b [ \u7de8\u96c6 | \u30bd\u30fc\u30b9\u30c6\u30ad\u30b9\u30c8\u3092\u7de8\u96c6\u3057\u307e\u3059 ] \u30f4\u30a9\u30eb\u30d5\u30ac\u30f3\u30b0\u30b8\u30e7\u30ea\u30c3\u30b7\u30e5\uff1a \u771f\u7a7a\u6280\u8853\uff1a\u4f55\u5341\u5e74\u3082\u306e\u9593\u3001\u30cf\u30a4\u30c6\u30af\u306b\u3068\u3063\u3066\u4e0d\u53ef\u6b20\u306a\u524d\u63d0\u6761\u4ef6 \u3002\u306e\uff1a \u7814\u7a76\u3068\u5b9f\u8df5\u306b\u304a\u3051\u308b\u771f\u7a7a \u3002 \u30d0\u30f3\u30c9  23 \u3001 \u3044\u3044\u3048\u3002  4 \u30012011\u5e748\u6708\u3001 S.  3\u20133 \u3001doi\uff1a 10.1002\/VIPR.201190033 \u3002  I. J. R. Aitchison\uff1a \u73fe\u4ee3\u306e\u91cf\u5b50\u7551\u306e\u7406\u8ad6\u306b\u306f\u4f55\u3082\u6383\u9664\u6a5f\u304c\u3042\u308a\u307e\u305b\u3093 \u3002\u306e\uff1a \u73fe\u4ee3\u7269\u7406\u5b66 \u3002 \u30d0\u30f3\u30c9  26 \u3001 \u3044\u3044\u3048\u3002  4 \u30011985\u5e747\u6708\u3001 S.  333\u2013391 \u3001doi\uff1a 10.1080\/00101518508219107 \uff08\u82f1\u8a9e\uff09\u3002  \u30b9\u30da\u30b7\u30e3\u30ea\u30b9\u30c8\u306e\u672c [ \u7de8\u96c6 | \u30bd\u30fc\u30b9\u30c6\u30ad\u30b9\u30c8\u3092\u7de8\u96c6\u3057\u307e\u3059 ] Oleg B. Malyshev\uff1a \u7c92\u5b50\u52a0\u901f\u5668\u306e\u771f\u7a7a\uff1a\u30d3\u30fc\u30e0\u771f\u7a7a\u30b7\u30b9\u30c6\u30e0\u306e\u30e2\u30c7\u30ea\u30f3\u30b0\u3001\u8a2d\u8a08\u3001\u52d5\u4f5c \u3002\u7b2c1\u7248\u3002 Wiley\u30012019\u3001ISBN 978-3-527-34302-7\u3001doi\uff1a 10,1002\/9783527809134 \uff08\u82f1\u8a9e\uff09\u3002  \u30de\u30c3\u30af\u30b9\u30fb\u30ef\u30c3\u30c4\uff1a \u624b\u52d5\u771f\u7a7a\u6280\u8853 \u3002 HRSG\u3002\uff1aKarl Justen\uff08= \u30b9\u30d7\u30ea\u30f3\u30ac\u30fc\u30ea\u30d5\u30a1\u30ec\u30f3\u30b9\u30c6\u30af\u30ce\u30ed\u30b8\u30fc \uff09\u3002 12.\u3001\u65b0\u3057\u304f\u7de8\u96c6\u3055\u308c\u305f\u7248\u3002 Springer Vieweg\u3001Wiesbaden [Heidelberg] 2018\u3001ISBN 978-3-658-13386-3\u3002  Wolfgang Jorisch\uff08\u7de8\uff09\uff1a \u5316\u5b66\u7523\u696d\u306e\u771f\u7a7a\u6280\u8853 \u3002\u7b2c1\u7248\u3002 Wiley-VCH\u3001Weinheim\u3001Bergstr 2015\u3001ISBN 978-3-527-31834-6\uff08\u82f1\u8a9e\uff09\u3002  \u30c9\u30ca\u30eb\u30c9\u30fbM\u30fb\u30de\u30c8\u30c3\u30af\u30b9\uff1a \u771f\u7a7a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\u306e\u57fa\u790e \u3002 Springer\u3001Berlin 2003\u3001ISBN 978-3-540-20410-7\uff08\u82f1\u8a9e\uff09\u3002  \u30b8\u30a7\u30fc\u30e0\u30ba\u30fbM\u30fb\u30e9\u30d5\u30a1\u30c6\u30a3\uff08hrsg\u3002\uff09\uff1a \u771f\u7a7a\u79d1\u5b66\u6280\u8853\u306e\u57fa\u790e \u3002\u30ef\u30a4\u30ea\u30fc\u3001\u30cb\u30e5\u30fc\u30e8\u30fc\u30af1998\u3001ISBN 978-0-471-17593-3\uff08\u82f1\u8a9e\uff09\u3002  Nagamitsu Yoshimura: \u771f\u7a7a\u6280\u8853\uff1a\u79d1\u5b66\u6a5f\u5668\u306e\u5b9f\u8df5 \u3002 Springer\u3001Berlin 2008\u3001ISBN 978-3-540-74432-0\uff08\u82f1\u8a9e\uff09\u3002  \u30b8\u30e7\u30f3\u30fbF\u30fb\u30aa\u30d5\u30e1\u30ed\u30f3\uff1a \u771f\u7a7a\u6280\u8853\u306b\u95a2\u3059\u308b\u30e6\u30fc\u30b6\u30fc\u30ac\u30a4\u30c9 \u3002 3.\u30a8\u30c7\u30a3\u30b7\u30e7\u30f3\u3002 Wiley-Interscience\u3001Hoboken\u3001NJ 2003\u3001ISBN 978-0-471-27052-2\uff08\u82f1\u8a9e\u3001 archive.org \uff09\u3002  \u30af\u30e9\u30b7\u30c3\u30af\u3001\u6b74\u53f2\u3001\u4eba\u6c17 [ \u7de8\u96c6 | \u30bd\u30fc\u30b9\u30c6\u30ad\u30b9\u30c8\u3092\u7de8\u96c6\u3057\u307e\u3059 ] M.\u30d4\u30e9\u30cb\u3001J\u3002\u30e4\u30fc\u30a6\u30c3\u30c9\uff1a Vaccum Engineering\u306e\u539f\u5247 \u3002\u30c1\u30e3\u30c3\u30d7\u30de\u30f3\u3068\u30db\u30fc\u30eb\u3001\u30ed\u30f3\u30c9\u30f31963\uff08\u82f1\u8a9e\u3001 archive.org \uff09\u3002  \u30cf\u30a4\u30f3\u30c4\u30fb\u30d0\u30eb\u30d5\u30a1\u30b9\uff1a \u771f\u7a7a\u6280\u8853\u306e\u6b74\u53f2\uff1a5\u4e16\u7d00\u306e\u30ec\u30d3\u30e5\u30fc \u3002\u306e\uff1a \u7814\u7a76\u3068\u5b9f\u8df5\u306b\u304a\u3051\u308b\u771f\u7a7a \u3002 \u30d0\u30f3\u30c9  25 \u3001 \u3044\u3044\u3048\u3002  2 \u3001 2013\u5e744\u6708\u3001 S.  8\u201313 \u3001doi\uff1a 10.1002\/VIPR.201300524 \u3002  \u30d8\u30cb\u30f3\u30b0\u30b8\u30a7\u30f3\u30c4\uff1a \u4f55\u3082\u3042\u308a\u307e\u305b\u3093\uff1a\u771f\u7a7a\u306e\u7269\u7406\u5b66 \uff08= \u79d1\u5b66\u3092\u4f53\u9a13\u3057\u3066\u304f\u3060\u3055\u3044 \uff09\u3002 Wiley-VCH\u3001Weinheim 2004\u3001ISBN 978-3-527-40319-6\u3002  \u4ed6\u306e\u5c02\u9580\u306e\u30c9\u30a2 [ \u7de8\u96c6 | \u30bd\u30fc\u30b9\u30c6\u30ad\u30b9\u30c8\u3092\u7de8\u96c6\u3057\u307e\u3059 ] \u30b8\u30e3\u30fc\u30ca\u30eb\u3068\u96d1\u8a8c [ \u7de8\u96c6 | \u30bd\u30fc\u30b9\u30c6\u30ad\u30b9\u30c8\u3092\u7de8\u96c6\u3057\u307e\u3059 ] \u2191  Karl Junky\u3001Wolfgings Jitechin\u3001Felix Sharipov\u3001Rudol Laughsman\u3001Alinnons Player\uff1a 124\u30c6\u30fc\u30d6\u30eb\u3068102\u306e\u4f8b\u3092\u5099\u3048\u305fWutz Manual Vacuum Technology \u3002 11.\u3001\u30aa\u30fc\u30d0\u30fc – \u30ab\u30a6\u30f3\u30bf\u30fc\u3068\u5e83\u544a\u3002\u7248\u3002 Wiesbaden 2013\u3001ISBN 978-3-8348-1745-7\u3002   \u2191  \u30b8\u30e7\u30f3\u30fbF\u30fb\u30aa\u30d5\u30e1\u30ed\u30f3\uff1a \u771f\u7a7a\u6280\u8853\u306e\u30e6\u30fc\u30b6\u30fc\u30ac\u30a4\u30c9 \u3002\u7b2c3\u7248\u7248\u3002 Wiley-Interscience\u3001Hoboken\u3001NJ 2003\u3001ISBN 0-471-27052-0\u3002   \u2191  \u771f\u7a7a\u306a\u3057\u3067\u306f\u4f55\u3082\u6a5f\u80fd\u3057\u307e\u305b\u3093-DVG -Home\u3002 2021\u5e7411\u670827\u65e5\u306b\u30a2\u30af\u30bb\u30b9 \u3002   \u2191  \u30ea\u30b5\u30fb\u30af\u30e9\u30a4\u30f3\uff1a \u79fb\u52d5\u3001\u6e2c\u5b9a\u3001\u30d7\u30ed\u30c7\u30e5\u30fc\u30b9\u3001\u30a4\u30f3\u30b9\u30d4\u30ec\u30fc\u30b7\u30e7\u30f3 – \u771f\u7a7a\u306f\u4f55\u304b\u3092\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\uff01 \u306e\uff1a prophysik.de\u3002 Wiley-VCH GmbH\u30012020\u5e7412\u670830\u65e5\u3001 2021\u5e7411\u670827\u65e5\u306b\u30a2\u30af\u30bb\u30b9 \u3002   \u2191  \u30eb\u30a4\u30b9D.\u30db\u30fc\u30eb\uff1a \u30a4\u30aa\u30f3\u771f\u7a7a\u30dd\u30f3\u30d7\uff1a\u30ac\u30b9\u306e\u7c92\u5b50\u3092\u9664\u53bb\u3059\u308b\u4ee3\u308f\u308a\u306b\u3001\u4e00\u90e8\u306e\u65b0\u3057\u3044\u30dd\u30f3\u30d7\u306f\u5358\u306b\u56fa\u76f8\u306b\u79fb\u52d5\u3057\u307e\u3059\u3002 \u306e\uff1a \u5316\u5b66 \u3002 \u30d0\u30f3\u30c9  128 \u3001 \u3044\u3044\u3048\u3002  3319 \u30018\u30021958\u5e748\u6708\u3001ISSN 0036-8075 \u3001 S.  279\u2013285 \u3001doi\uff1a 10.1126\/science.128.3319.279 \uff08\u82f1\u8a9e\u3001 science.org [2023\u5e741\u670815\u65e5\u306b\u30a2\u30af\u30bb\u30b9]\uff09\u3002   \u2191  \u30a2\u30f3\u30c9\u30ec\u30a2\u30b9\u30fb\u30b3\u30eb\u30d6\u30e9\u30f3\u30ca\u30fc\uff1a \u4ed5\u7d44\u307f\uff1a\u5b87\u5b99\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u30c1\u30e3\u30f3\u30d0\u30fc\u306e\u771f\u7a7a\u6280\u8853\u3002 2022\u5e747\u67081\u65e5\u306b\u30a2\u30af\u30bb\u30b9 \uff08\u30b9\u30a4\u30b9\u30cf\u30a4\u30c9\u30a4\u30c4\u8a9e\uff09\u3002   \u2191  \u30d7\u30ed\u30bb\u30b9\u30ac\u30b9\u306e\u30dd\u30f3\u30d7\u3002 Leybold gmbh\u3001 2021\u5e7411\u670827\u65e5\u306b\u30a2\u30af\u30bb\u30b9 \u3002   \u2191  Georg Gaertner\uff1a \u771f\u7a7a\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306e\u6b74\u53f2\u7684\u767a\u5c55\u3068\u5c06\u6765\u306e\u50be\u5411 \u3002\u306e\uff1a Journal of Vacuum Science\uff06Technology B\u3001Nanotechnology and Microelectronics\uff1a\u6750\u6599\u3001\u52a0\u5de5\u3001\u6e2c\u5b9a\u3001\u304a\u3088\u3073\u73fe\u8c61 \u3002 \u30d0\u30f3\u30c9  30 \u3001 \u3044\u3044\u3048\u3002  6 \u30012012\u5e7411\u6708\u3001ISSN 2166-2746 \u3001 S.  060801 \u3001doi\uff1a 10.1116\/1,4747705 \uff08\u82f1\u8a9e\u3001 Scitation.org [2023\u5e741\u670815\u65e5\u306b\u30a2\u30af\u30bb\u30b9]\uff09\u3002   \u2191  \u30d0\u30fc\u30d0\u30e9\u30fb\u30a6\u30eb\u30d5\u30a1\u30fc\uff1a \u30a6\u30a7\u30f3\u30c7\u30eb\u30b7\u30e5\u30bf\u30a4\u30f37-X\uff1a\u65b0\u7a2e\u306e\u4e2d\u6838\u7684\u306a\u878d\u5408\u3002 \u306e\uff1a \u30b9\u30da\u30af\u30c8\u30e9\u30e0\u3002 \u79d1\u5b66\u306everlagsgesellschaft\u30012014\u5e746\u670810\u65e5\u3001 2021\u5e7411\u670827\u65e5\u306b\u30a2\u30af\u30bb\u30b9 \u3002   \u2191  Georg Gaertner\uff1a \u771f\u7a7a\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3068\u771f\u7a7a\u96fb\u5b50\u6e90\u3068\u5c06\u6765\u306e\u958b\u767a\u52d5\u5411\u306e\u6b74\u53f2 \u3002\u306e\uff1a \u771f\u7a7a\u96fb\u5b50\u6e90\u306b\u304a\u3051\u308b\u6700\u65b0\u306e\u958b\u767a \u3002 \u30d0\u30f3\u30c9  135 \u3002 Springer International Publishing\u3001Cham 2020\u3001ISBN 978-3-03047290-0\u3001 S.  1\u201331 \u3001doi\uff1a 10,1007\/978-3-030-47291-7_1 \uff08\u82f1\u8a9e\u3001 springer.com [2023\u5e741\u670815\u65e5\u306b\u30a2\u30af\u30bb\u30b9]\uff09\u3002   \u2191  \u30b9\u30b1\u30fc\u30c8 –  AVS\uff1a\u6750\u6599\u3001\u30a4\u30f3\u30bf\u30fc\u30d5\u30a7\u30a4\u30b9\u3001\u304a\u3088\u3073\u51e6\u7406\u306e\u79d1\u5b66\u3068\u6280\u8853\u3002 2021\u5e7411\u670827\u65e5\u306b\u30a2\u30af\u30bb\u30b9 \uff08\u82f1\u8a9e\uff09\u3002   \u2191  DVG-E.V\u3078\u3088\u3046\u3053\u305d\u3002 -DVG-Home\u3002 2021\u5e7411\u670827\u65e5\u306b\u30a2\u30af\u30bb\u30b9 \u3002   \u2191  iuvsta -dvg -home\u3002 2021\u5e7411\u670827\u65e5\u306b\u30a2\u30af\u30bb\u30b9 \u3002         (adsbygoogle = window.adsbygoogle || []).push({});after-content-x4"},{"@context":"http:\/\/schema.org\/","@type":"BreadcrumbList","itemListElement":[{"@type":"ListItem","position":1,"item":{"@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/#breadcrumbitem","name":"Enzyklop\u00e4die"}},{"@type":"ListItem","position":2,"item":{"@id":"https:\/\/wiki.edu.vn\/all2jp\/wiki11\/archives\/4249#breadcrumbitem","name":"Vatuumthik -Wikipedia"}}]}]