[{"@context":"http:\/\/schema.org\/","@type":"BlogPosting","@id":"https:\/\/wiki.edu.vn\/jp\/wiki4\/2021\/05\/02\/%e3%82%bd%e3%83%95%e3%83%88%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3-wikipedia\/#BlogPosting","mainEntityOfPage":"https:\/\/wiki.edu.vn\/jp\/wiki4\/2021\/05\/02\/%e3%82%bd%e3%83%95%e3%83%88%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3-wikipedia\/","headline":"\u30bd\u30d5\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3 – Wikipedia","name":"\u30bd\u30d5\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3 – Wikipedia","description":"\u30bd\u30d5\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3(soft lithography)\u3068\u306f\u5fae\u7d30\u306a\u92f3\u578b\u306b\u30b7\u30ea\u30b3\u30fc\u30f3\u6a39\u8102\u306a\u3069\u306e\u300c\u3084\u308f\u3089\u304b\u3044\u3082\u306e\u300d\u3092\u6d41\u3057\u8fbc\u307f\u3001\u305d\u306e\u307e\u307e\u786c\u5316\u3055\u305b\u308b\u3053\u3068\u3067\u5fae\u7d30\u306a\u7acb\u4f53\u69cb\u9020\u3092\u8ee2\u5199\u3059\u308b\u6280\u8853[1]\u3002 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\u578b\u304c\u5b8c\u6210\u3057\u305f\u3089\u30dd\u30ea\u30b8\u30e1\u30c1\u30eb\u30b7\u30ed\u30ad\u30b5\u30f3\uff08PDMS:\u4e8c\u6db2\u786c\u5316\u6027\u306e\u30b7\u30ea\u30b3\u30fc\u30f3\u6a39\u8102\uff09\u306b\u5f62\u72b6\u306e\u8ee2\u5199\u3092\u884c\u3046[1]\u3002 Table of Contents \u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30fb\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3[\u7de8\u96c6]\u30de\u30a4\u30af\u30ed\u30b3\u30f3\u30bf\u30af\u30c8\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0[\u7de8\u96c6]\u30ca\u30ce\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0[\u7de8\u96c6]\u95a2\u9023\u9805\u76ee[\u7de8\u96c6] \u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30fb\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3[\u7de8\u96c6] 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\u30de\u30a4\u30af\u30ed\u30b3\u30f3\u30bf\u30af\u30c8\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0\u6cd5\u306f1993\u5e74\u306b\u30cf\u30fc\u30d0\u30fc\u30c9\u5927\u5b66\u306e A.Kumar\u3001\u30b8\u30e7\u30fc\u30b8\u30fb\u30db\u30ef\u30a4\u30c8\u30b5\u30a4\u30ba\u3088\u3063\u3066\u5831\u544a\u3055\u308c\u305f\u30ca\u30ce\u69cb\u9020\u69cb\u7bc9\u6cd5[2]\u3002\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3084\u96fb\u5b50\u7dda\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3067\u88fd\u4f5c\u3057\u305f\u8ee2\u5199\u578b\u306e\u8868\u9762\u306b\u5206\u5b50\u3092\u5857\u5e03\u3057\u3066\u57fa\u677f\u306b\u5bc6\u7740\u3059\u308b\u3053\u3068\u3067\u3001\u30d1\u30bf\u30fc\u30f3\u5316\u3057\u305f\u5206\u5b50\u306e\u819c\u3092\u57fa\u677f\u4e0a\u306b\u4f5c\u88fd\u3059\u308b\u3002\u5f93\u6765\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3067\u4f7f\u7528\u3055\u308c\u3066\u3044\u305f\u5927\u639b\u304b\u308a\u306a\u7e2e\u5c0f\u6295\u5f71\u578b\u9732\u5149\u88c5\u7f6e 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\u30ca\u30ce\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0[\u7de8\u96c6] \u30ca\u30ce\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0\u306f\u91d1\u5c5e\u3092\u542b\u6709\u3059\u308b\u30a4\u30f3\u30af\u306e\u8ee2\u5199\u306b\u3088\u3063\u3066\u5fae\u7d30\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u3002 \u95a2\u9023\u9805\u76ee[\u7de8\u96c6] \u677e\u4e95\u5d07\u884c, \u5c0f\u677e\u4eac\u55e3,","datePublished":"2021-05-02","dateModified":"2021-05-02","author":{"@type":"Person","@id":"https:\/\/wiki.edu.vn\/jp\/wiki4\/author\/lordneo\/#Person","name":"lordneo","url":"https:\/\/wiki.edu.vn\/jp\/wiki4\/author\/lordneo\/","image":{"@type":"ImageObject","@id":"https:\/\/secure.gravatar.com\/avatar\/c9645c498c9701c88b89b8537773dd7c?s=96&d=mm&r=g","url":"https:\/\/secure.gravatar.com\/avatar\/c9645c498c9701c88b89b8537773dd7c?s=96&d=mm&r=g","height":96,"width":96}},"publisher":{"@type":"Organization","name":"Enzyklop\u00e4die","logo":{"@type":"ImageObject","@id":"https:\/\/wiki.edu.vn\/wiki4\/wp-content\/uploads\/2023\/08\/download.jpg","url":"https:\/\/wiki.edu.vn\/wiki4\/wp-content\/uploads\/2023\/08\/download.jpg","width":600,"height":60}},"image":{"@type":"ImageObject","@id":"https:\/\/ja.wikipedia.org\/wiki\/Special:CentralAutoLogin\/start?type=1x1","url":"https:\/\/ja.wikipedia.org\/wiki\/Special:CentralAutoLogin\/start?type=1x1","height":"1","width":"1"},"url":"https:\/\/wiki.edu.vn\/jp\/wiki4\/2021\/05\/02\/%e3%82%bd%e3%83%95%e3%83%88%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3-wikipedia\/","wordCount":849,"articleBody":"\u30bd\u30d5\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3(soft lithography)\u3068\u306f\u5fae\u7d30\u306a\u92f3\u578b\u306b\u30b7\u30ea\u30b3\u30fc\u30f3\u6a39\u8102\u306a\u3069\u306e\u300c\u3084\u308f\u3089\u304b\u3044\u3082\u306e\u300d\u3092\u6d41\u3057\u8fbc\u307f\u3001\u305d\u306e\u307e\u307e\u786c\u5316\u3055\u305b\u308b\u3053\u3068\u3067\u5fae\u7d30\u306a\u7acb\u4f53\u69cb\u9020\u3092\u8ee2\u5199\u3059\u308b\u6280\u8853[1]\u3002  \u5f93\u6765\u306e\u30de\u30a4\u30af\u30ed\u30de\u30b7\u30cb\u30f3\u30b0\u6280\u8853\u3068\u6bd4\u8f03\u3057\u3066\u3001\u4e00\u5ea6\u3001\u30e2\u30fc\u30eb\u30c9\uff08\u92f3\u578b\uff09\u4f5c\u6210\u3059\u308c\u3070\u3001\u4ee5\u5f8c\u306e\u8ee2\u5199\u5de5\u7a0b\u3067\u306f\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306a\u3069\u306e\u5de5\u7a0b\u3092\u5fc5\u8981\u3068\u305b\u305a\u3001\u7c21\u4fbf\u306b\u69cb\u9020\u4f53\u3092\u8907\u88fd\u3067\u304d\u308b[1]\u3002\u4e00\u4f8b\u3068\u3057\u3066\u5fae\u5c0f\u6d41\u4f53\u7d20\u5b50\u306e\u88fd\u9020\u306b\u4f7f\u7528\u3059\u308b\u305f\u3081\u306e\u578b\u306e\u4f5c\u6210\u306fSU-8\u306e\u3088\u3046\u306a\u5149\u786c\u5316\u6a39\u8102\u3084\u305d\u308c\u3088\u308a\u3082\u5de5\u7a0b\u6570\u304c\u5897\u52a0\u3057\u3066\u88fd\u4f5c\u306b\u8981\u3059\u308b\u671f\u9593\u304c\u9577\u304f\u306a\u308b\u3082\u306e\u306e\u3001\u8010\u4e45\u6027\u3001\u5f37\u5ea6\u3001\u304a\u3088\u3073\u5fae\u7d30\u653e\u96fb\u52a0\u5de5\u3084\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u59cb\u3081\u3068\u3059\u308b\u591a\u69d8\u306a\u5de5\u7a0b\u306b\u3088\u308a\u3001\u3055\u3089\u306b\u8907\u96d1\u306a\u518d\u52a0\u5de5\u3092\u65bd\u3059\u3053\u3068\u304c\u53ef\u80fd\u306a\u30cb\u30c3\u30b1\u30eb\u306e\u96fb\u92f3\u304c\u7528\u3044\u3089\u308c\u308b[1]\u3002\u578b\u304c\u5b8c\u6210\u3057\u305f\u3089\u30dd\u30ea\u30b8\u30e1\u30c1\u30eb\u30b7\u30ed\u30ad\u30b5\u30f3\uff08PDMS:\u4e8c\u6db2\u786c\u5316\u6027\u306e\u30b7\u30ea\u30b3\u30fc\u30f3\u6a39\u8102\uff09\u306b\u5f62\u72b6\u306e\u8ee2\u5199\u3092\u884c\u3046[1]\u3002 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Contents\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30fb\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3[\u7de8\u96c6]\u30de\u30a4\u30af\u30ed\u30b3\u30f3\u30bf\u30af\u30c8\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0[\u7de8\u96c6]\u30ca\u30ce\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0[\u7de8\u96c6]\u95a2\u9023\u9805\u76ee[\u7de8\u96c6]\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30fb\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3[\u7de8\u96c6]\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30fb\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306f\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u4e0a\u306b\u30ec\u30b8\u30b9\u30c8\u3092\u5857\u5e03\u3057\u305f\u72b6\u614b\u3067200\u2103\u307e\u3067\u52a0\u71b1\u5f8c\u3001\u30e2\u30fc\u30eb\u30c9\u3092\u5bc6\u7740\u3055\u305b\u3066\u305d\u306e\u5f8c\u51b7\u5374\u3059\u308b\u4e8b\u3067\u30d1\u30bf\u30fc\u30f3\u3092\u5f62\u6210\u3059\u308b\u71b1\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30fb\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u6280\u8853\u3068\u7d2b\u5916\u7dda\u786c\u5316\u6a39\u8102\u3092\u7528\u3044\u308b\u5149\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30fb\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u6280\u8853\u304c\u3042\u308b\u3002\u30de\u30a4\u30af\u30ed\u30b3\u30f3\u30bf\u30af\u30c8\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0[\u7de8\u96c6]\u30de\u30a4\u30af\u30ed\u30b3\u30f3\u30bf\u30af\u30c8\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0\u6cd5\u306f1993\u5e74\u306b\u30cf\u30fc\u30d0\u30fc\u30c9\u5927\u5b66\u306e A.Kumar\u3001\u30b8\u30e7\u30fc\u30b8\u30fb\u30db\u30ef\u30a4\u30c8\u30b5\u30a4\u30ba\u3088\u3063\u3066\u5831\u544a\u3055\u308c\u305f\u30ca\u30ce\u69cb\u9020\u69cb\u7bc9\u6cd5[2]\u3002\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3084\u96fb\u5b50\u7dda\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3067\u88fd\u4f5c\u3057\u305f\u8ee2\u5199\u578b\u306e\u8868\u9762\u306b\u5206\u5b50\u3092\u5857\u5e03\u3057\u3066\u57fa\u677f\u306b\u5bc6\u7740\u3059\u308b\u3053\u3068\u3067\u3001\u30d1\u30bf\u30fc\u30f3\u5316\u3057\u305f\u5206\u5b50\u306e\u819c\u3092\u57fa\u677f\u4e0a\u306b\u4f5c\u88fd\u3059\u308b\u3002\u5f93\u6765\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3067\u4f7f\u7528\u3055\u308c\u3066\u3044\u305f\u5927\u639b\u304b\u308a\u306a\u7e2e\u5c0f\u6295\u5f71\u578b\u9732\u5149\u88c5\u7f6e (\u30b9\u30c6\u30c3\u30d1\u30fc)\u3092\u7528\u3044\u305a\u306b\u8ee2\u5199\u578b\u306e\u4f7f\u7528\u3067\u5fae\u7d30\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u5b89\u4fa1\u3067\u7c21\u4fbf\u306b\u8907\u88fd\u3059\u308b\u4e8b\u304c\u53ef\u80fd\u3067\u5206\u5b50\u3068\u57fa\u677f\u8868\u9762\u3068\u306e\u5316\u5b66\u53cd\u5fdc\u3092\u5229\u7528\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u5b89\u5b9a\u3057\u305f\u81ea\u5df1\u7d44\u7e54\u5316\u5358\u5206\u5b50\u819c(SAM)\u3092\u57fa\u677f\u4e0a\u306b\u8ee2\u5199\u3067\u304d\u308b\u3002\u5229\u7528\u3055\u308c\u308b\u5206\u5b50\u306f\u30c1\u30aa\u30fc\u30eb\u5206\u5b50\u3068\u91d1\u8868\u9762\uff08S\u539f\u5b50-Au\uff09\u3001\u30b7\u30e9\u30f3\u5206\u5b50\u3068\u9178\u5316\u7269\u3001\u30d2\u30c9\u30ed\u30ad\u30b7\u30eb\u57faOH\uff0d\u3092\u6301\u3064\u7d76\u7e01\u4f53\u8868\u9762\uff08Si\u539f\u5b50-O-\uff09\u306e\u7d44\u307f\u5408\u308f\u305b\u304c\u5229\u7528\u3055\u308c\u3066\u3044\u308b[3]\u3002\u30ca\u30ce\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0[\u7de8\u96c6]\u30ca\u30ce\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0\u306f\u91d1\u5c5e\u3092\u542b\u6709\u3059\u308b\u30a4\u30f3\u30af\u306e\u8ee2\u5199\u306b\u3088\u3063\u3066\u5fae\u7d30\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u3002 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