[{"@context":"http:\/\/schema.org\/","@type":"BlogPosting","@id":"https:\/\/wiki.edu.vn\/jp\/wiki5\/archives\/292#BlogPosting","mainEntityOfPage":"https:\/\/wiki.edu.vn\/jp\/wiki5\/archives\/292","headline":"\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3 – Wikipedia","name":"\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3 – Wikipedia","description":"\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3 (dichlorosilane) \u306f\u3001\u5316\u5b66\u5f0fH2SiCl2\u3067\u8868\u308f\u3055\u308c\u308b\u5316\u5408\u7269\u3067\u3042\u308b\u3002\u4e00\u822c\u7684\u306b\u306f\u7565\u79f0\u306eDCS\u3067\u547c\u3070\u308c\u308b\u3002\u305d\u306e\u4e3b\u306a\u7528\u9014\u3067\u306f\u3001LPCVD\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u3067\u30a2\u30f3\u30e2\u30cb\u30a2 (NH3\uff09\u3068\u6df7\u5408\u3055\u308c\u3001\u534a\u5c0e\u4f53\u51e6\u7406\u3067\u7a92\u5316\u30b1\u30a4\u7d20\u3092\u6210\u9577\u3055\u305b\u308b\u3002DCS\u30fbNH3\u306e\u6fc3\u5ea6\u304c\u9ad8\u3044\uff08\u3064\u307e\u308a16\uff1a1\uff09\u3068\u3001\u901a\u5e38\u3001\u5fdc\u529b\u306e\u4f4e\u3044\u7a92\u5316\u7269\u819c\u304c\u5f97\u3089\u308c\u308b\u3002 \u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306f\u30011919\u5e74\u306b\u30e2\u30ce\u30b7\u30e9\u30f3 (SiH4) \u3068\u5869\u5316\u6c34\u7d20\u306e\u6c17\u76f8\u53cd\u5fdc\u306b\u3088\u3063\u3066\u6700\u521d\u306b\u8abf\u88fd\u3055\u308c\u3001Stock\u3068Somieski\u306b\u3088\u3063\u3066\u5831\u544a\u3055\u308c\u305f\u3002\u6c17\u76f8\u3067\u306f\u3001\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u304c\u6c34\u84b8\u6c17\u3068\u53cd\u5fdc\u3057\u3066\u3001\u30ac\u30b9\u72b6\u306e\u30e2\u30ce\u30de\u30fc\uff08\u30d7\u30ed\u30b7\u30ed\u30ad\u30b5\u30f3\u3001H2SiO\uff09\u3092\u751f\u6210\u3059\u308b\u3053\u3068\u304c\u308f\u304b\u3063\u305f\u3002\u30d7\u30ed\u30b7\u30ed\u30ad\u30b5\u30f3\u306f\u6db2\u76f8\u3067\u6025\u901f\u306b\u91cd\u5408\u3057\u3001\u6c17\u76f8\u3067\u306f\u3086\u3063\u304f\u308a\u3068\u91cd\u5408\u3059\u308b\u3002\u305d\u306e\u7d50\u679c\u3001\u6db2\u4f53\u304a\u3088\u3073\u56fa\u4f53\u306e\u30dd\u30ea\u30b7\u30ed\u30ad\u30b5\u30f3 [H2SiO]n\u304c\u5f97\u3089\u308c\u308b\u3002\u771f\u7a7a\u84b8\u7559\u306b\u3088\u3063\u3066\u96c6\u3081\u3089\u308c\u305f\u6db2\u4f53\u90e8\u5206\u306f\u3001\u7c98\u6027\u306b\u306a\u308a\u3001\u5ba4\u6e29\u3067\u30b2\u30eb\u5316\u3059\u308b\u3002H2SiCl2\u306e\u30d9\u30f3\u30bc\u30f3\u6eb6\u6db2\u3092\u6c34\u3068\u77ed\u6642\u9593\u63a5\u89e6\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u308a\u52a0\u6c34\u5206\u89e3\u3092\u884c\u3044\u3001\u5206\u5b50\u91cf\u306f [H2SiO]6\u306e\u5e73\u5747\u7d44\u6210\u3068\u4e00\u81f4\u3059\u308b\u3088\u3046\u306b\u6c7a\u5b9a\u3055\u308c\u305f\u3002\u5206\u6790\u3068\u5206\u5b50\u91cf\u306e\u6c7a\u5b9a\u306b\u3088\u308a\u3001n\u306f6\u304b\u30897\u306e\u9593\u3067\u3042\u308b\u3068\u6c7a\u5b9a\u3055\u308c\u305f\u3002\u3055\u3089\u306b\u5b9f\u9a13\u3092\u9032\u3081\u308b\u3068\u3001\u6642\u9593\u306e\u7d4c\u904e\u3068\u3068\u3082\u306bn\u304c\u5897\u52a0\u3059\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u305f\u3002\u6c34\u6027\u52a0\u6c34\u5206\u89e3\u7269\u3068\u9577\u671f\u9593\u63a5\u89e6\u3057\u305f\u5f8c\u3001\u30dd\u30ea\u30de\u30fc [HSi(OH)O]n\u304c\u751f\u6210\u3055\u308c\u305f\u3002\u30b7\u30ea\u30b3\u30fc\u30f3\u7523\u696d\u304c\u6210\u9577\u3059\u308b\u307e\u3067\u3001\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306e\u5165\u624b\u53ef\u80fd\u6027\u306f\u9650\u3089\u308c\u3066\u3044\u305f[2]\u3002 Table of Contents \u53cd\u5fdc\u3068\u751f\u6210[\u7de8\u96c6]\u52a0\u6c34\u5206\u89e3[\u7de8\u96c6]\u4f7f\u7528\u306e\u5229\u70b9[\u7de8\u96c6]\u5b89\u5168\u4e0a\u306e\u5371\u967a[\u7de8\u96c6] \u53cd\u5fdc\u3068\u751f\u6210[\u7de8\u96c6] \u307b\u3068\u3093\u3069\u306e\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306f\u3001\u30c8\u30ea\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306e\u751f\u6210\u3092\u76ee\u7684\u3068\u3059\u308b\u3001\u5869\u5316\u6c34\u7d20\u3068\u30b1\u30a4\u7d20\u306e\u53cd\u5fdc\u306e\u526f\u7523\u7269\u3068\u3057\u3066\u751f\u3058\u308b\u3002 \u30c8\u30ea\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306e\u4e0d\u5747\u5316\u304c\u597d\u307e\u3057\u3044\u7d4c\u8def\u3067\u3042\u308b[3]\u3002 2 SiHCl3 SiCl4","datePublished":"2021-11-30","dateModified":"2021-11-30","author":{"@type":"Person","@id":"https:\/\/wiki.edu.vn\/jp\/wiki5\/archives\/author\/lordneo#Person","name":"lordneo","url":"https:\/\/wiki.edu.vn\/jp\/wiki5\/archives\/author\/lordneo","image":{"@type":"ImageObject","@id":"https:\/\/secure.gravatar.com\/avatar\/c9645c498c9701c88b89b8537773dd7c?s=96&d=mm&r=g","url":"https:\/\/secure.gravatar.com\/avatar\/c9645c498c9701c88b89b8537773dd7c?s=96&d=mm&r=g","height":96,"width":96}},"publisher":{"@type":"Organization","name":"Enzyklop\u00e4die","logo":{"@type":"ImageObject","@id":"https:\/\/wiki.edu.vn\/wiki4\/wp-content\/uploads\/2023\/08\/download.jpg","url":"https:\/\/wiki.edu.vn\/wiki4\/wp-content\/uploads\/2023\/08\/download.jpg","width":600,"height":60}},"image":{"@type":"ImageObject","@id":"https:\/\/upload.wikimedia.org\/wikipedia\/commons\/thumb\/9\/96\/Equilibrium.svg\/15px-Equilibrium.svg.png","url":"https:\/\/upload.wikimedia.org\/wikipedia\/commons\/thumb\/9\/96\/Equilibrium.svg\/15px-Equilibrium.svg.png","height":"13","width":"15"},"url":"https:\/\/wiki.edu.vn\/jp\/wiki5\/archives\/292","about":["Wiki"],"wordCount":891,"articleBody":"\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3 (dichlorosilane) \u306f\u3001\u5316\u5b66\u5f0fH2SiCl2\u3067\u8868\u308f\u3055\u308c\u308b\u5316\u5408\u7269\u3067\u3042\u308b\u3002\u4e00\u822c\u7684\u306b\u306f\u7565\u79f0\u306eDCS\u3067\u547c\u3070\u308c\u308b\u3002\u305d\u306e\u4e3b\u306a\u7528\u9014\u3067\u306f\u3001LPCVD\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u3067\u30a2\u30f3\u30e2\u30cb\u30a2 (NH3\uff09\u3068\u6df7\u5408\u3055\u308c\u3001\u534a\u5c0e\u4f53\u51e6\u7406\u3067\u7a92\u5316\u30b1\u30a4\u7d20\u3092\u6210\u9577\u3055\u305b\u308b\u3002DCS\u30fbNH3\u306e\u6fc3\u5ea6\u304c\u9ad8\u3044\uff08\u3064\u307e\u308a16\uff1a1\uff09\u3068\u3001\u901a\u5e38\u3001\u5fdc\u529b\u306e\u4f4e\u3044\u7a92\u5316\u7269\u819c\u304c\u5f97\u3089\u308c\u308b\u3002  \u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306f\u30011919\u5e74\u306b\u30e2\u30ce\u30b7\u30e9\u30f3 (SiH4) \u3068\u5869\u5316\u6c34\u7d20\u306e\u6c17\u76f8\u53cd\u5fdc\u306b\u3088\u3063\u3066\u6700\u521d\u306b\u8abf\u88fd\u3055\u308c\u3001Stock\u3068Somieski\u306b\u3088\u3063\u3066\u5831\u544a\u3055\u308c\u305f\u3002\u6c17\u76f8\u3067\u306f\u3001\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u304c\u6c34\u84b8\u6c17\u3068\u53cd\u5fdc\u3057\u3066\u3001\u30ac\u30b9\u72b6\u306e\u30e2\u30ce\u30de\u30fc\uff08\u30d7\u30ed\u30b7\u30ed\u30ad\u30b5\u30f3\u3001H2SiO\uff09\u3092\u751f\u6210\u3059\u308b\u3053\u3068\u304c\u308f\u304b\u3063\u305f\u3002\u30d7\u30ed\u30b7\u30ed\u30ad\u30b5\u30f3\u306f\u6db2\u76f8\u3067\u6025\u901f\u306b\u91cd\u5408\u3057\u3001\u6c17\u76f8\u3067\u306f\u3086\u3063\u304f\u308a\u3068\u91cd\u5408\u3059\u308b\u3002\u305d\u306e\u7d50\u679c\u3001\u6db2\u4f53\u304a\u3088\u3073\u56fa\u4f53\u306e\u30dd\u30ea\u30b7\u30ed\u30ad\u30b5\u30f3 [H2SiO]n\u304c\u5f97\u3089\u308c\u308b\u3002\u771f\u7a7a\u84b8\u7559\u306b\u3088\u3063\u3066\u96c6\u3081\u3089\u308c\u305f\u6db2\u4f53\u90e8\u5206\u306f\u3001\u7c98\u6027\u306b\u306a\u308a\u3001\u5ba4\u6e29\u3067\u30b2\u30eb\u5316\u3059\u308b\u3002H2SiCl2\u306e\u30d9\u30f3\u30bc\u30f3\u6eb6\u6db2\u3092\u6c34\u3068\u77ed\u6642\u9593\u63a5\u89e6\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u308a\u52a0\u6c34\u5206\u89e3\u3092\u884c\u3044\u3001\u5206\u5b50\u91cf\u306f [H2SiO]6\u306e\u5e73\u5747\u7d44\u6210\u3068\u4e00\u81f4\u3059\u308b\u3088\u3046\u306b\u6c7a\u5b9a\u3055\u308c\u305f\u3002\u5206\u6790\u3068\u5206\u5b50\u91cf\u306e\u6c7a\u5b9a\u306b\u3088\u308a\u3001n\u306f6\u304b\u30897\u306e\u9593\u3067\u3042\u308b\u3068\u6c7a\u5b9a\u3055\u308c\u305f\u3002\u3055\u3089\u306b\u5b9f\u9a13\u3092\u9032\u3081\u308b\u3068\u3001\u6642\u9593\u306e\u7d4c\u904e\u3068\u3068\u3082\u306bn\u304c\u5897\u52a0\u3059\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u305f\u3002\u6c34\u6027\u52a0\u6c34\u5206\u89e3\u7269\u3068\u9577\u671f\u9593\u63a5\u89e6\u3057\u305f\u5f8c\u3001\u30dd\u30ea\u30de\u30fc [HSi(OH)O]n\u304c\u751f\u6210\u3055\u308c\u305f\u3002\u30b7\u30ea\u30b3\u30fc\u30f3\u7523\u696d\u304c\u6210\u9577\u3059\u308b\u307e\u3067\u3001\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306e\u5165\u624b\u53ef\u80fd\u6027\u306f\u9650\u3089\u308c\u3066\u3044\u305f[2]\u3002Table of Contents\u53cd\u5fdc\u3068\u751f\u6210[\u7de8\u96c6]\u52a0\u6c34\u5206\u89e3[\u7de8\u96c6]\u4f7f\u7528\u306e\u5229\u70b9[\u7de8\u96c6]\u5b89\u5168\u4e0a\u306e\u5371\u967a[\u7de8\u96c6]\u53cd\u5fdc\u3068\u751f\u6210[\u7de8\u96c6]\u307b\u3068\u3093\u3069\u306e\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306f\u3001\u30c8\u30ea\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306e\u751f\u6210\u3092\u76ee\u7684\u3068\u3059\u308b\u3001\u5869\u5316\u6c34\u7d20\u3068\u30b1\u30a4\u7d20\u306e\u53cd\u5fdc\u306e\u526f\u7523\u7269\u3068\u3057\u3066\u751f\u3058\u308b\u3002  \u30c8\u30ea\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306e\u4e0d\u5747\u5316\u304c\u597d\u307e\u3057\u3044\u7d4c\u8def\u3067\u3042\u308b[3]\u30022 SiHCl3 SiCl4 + SiH2Cl2\u52a0\u6c34\u5206\u89e3[\u7de8\u96c6]Stock\u3068Somieski\u306f\u3001H2SiCl2\u306e\u30d9\u30f3\u30bc\u30f3\u6eb6\u6db2\u3092\u5927\u904e\u5270\u306e\u6c34\u3068\u77ed\u6642\u9593\u63a5\u89e6\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u52a0\u6c34\u5206\u89e3\u306b\u6210\u529f\u3057\u305f[2][4]\u3002\u5927\u898f\u6a21\u306a\u52a0\u6c34\u5206\u89e3\u306f\u30010\u00a0\u2103\u306e\u30a8\u30fc\u30c6\u30eb\/\u30a2\u30eb\u30ab\u30f3\u6df7\u5408\u6eb6\u5a92\u30b7\u30b9\u30c6\u30e0\u3067\u884c\u308f\u308c\u3001\u63ee\u767a\u6027\u3068\u4e0d\u63ee\u767a\u6027\u306e[H2SiO]n\u306e\u6df7\u5408\u7269\u304c\u5f97\u3089\u308c\u305f\u3002Fischer\u3068Kiegsmann\u306f\u3001\u6c34\u4f9b\u7d66\u6e90\u3068\u3057\u3066NiCl2\u30fb6H2O\u3092\u4f7f\u7528\u3057\u3066\u3001\u30d8\u30ad\u30b5\u30f3\u4e2d\u306e\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306e\u52a0\u6c34\u5206\u89e3\u3092\u8a66\u307f\u305f\u304c\u3001\u3053\u306e\u7cfb\u306f\u5931\u6557\u3057\u305f[2]\u3002\u3057\u304b\u3057\u3001\u5f7c\u3089\u306f\u3001\u221210\u00a0\u2103\u3067\u5e0c\u8584\u306aEt2O\/CCl4\u3092\u4f7f\u7528\u3057\u3066\u52a0\u6c34\u5206\u89e3\u306b\u6210\u529f\u3057\u305f\u3002\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306e\u52a0\u6c34\u5206\u89e3\u3092\u5b8c\u4e86\u3059\u308b\u76ee\u7684\u306f\u3001\u6fc3\u7e2e\u3055\u308c\u305f\u52a0\u6c34\u5206\u89e3\u751f\u6210\u7269\u3092\u53ce\u96c6\u3057\u3001\u6eb6\u6db2\u3092\u84b8\u7559\u3057\u3001\u30b8\u30af\u30ed\u30ed\u30e1\u30bf\u30f3\u4e2d\u306e [H2SiO]n\u30aa\u30ea\u30b4\u30de\u30fc\u306e\u6eb6\u6db2\u3092\u56de\u53ce\u3059\u308b\u3053\u3068\u3067\u3042\u308b[2]\u3002\u3053\u308c\u3089\u306e\u65b9\u6cd5\u3092\u4f7f\u7528\u3057\u3066\u3001\u74b0\u72b6\u30dd\u30ea\u30b7\u30ed\u30ad\u30b5\u30f3\u3092\u5f97\u305f\u3002\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u3092\u52a0\u6c34\u5206\u89e3\u3059\u308b\u5225\u306e\u76ee\u7684\u306f\u3001\u7dda\u72b6\u30dd\u30ea\u30b7\u30ed\u30ad\u30b5\u30f3\u3092\u5f97\u308b\u3053\u3068\u3067\u3042\u308a\u3001\u591a\u304f\u306e\u7570\u306a\u308b\u8907\u96d1\u306a\u65b9\u6cd5\u3067\u884c\u3046\u3053\u3068\u304c\u3067\u304d\u308b[4]\u3002\u30b8\u30a8\u30c1\u30eb\u30a8\u30fc\u30c6\u30eb\u3001\u30b8\u30af\u30ed\u30ed\u30e1\u30bf\u30f3\u3001\u307e\u305f\u306f\u30da\u30f3\u30bf\u30f3\u4e2d\u3067\u306e\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3\u306e\u52a0\u6c34\u5206\u89e3\u306b\u3088\u308a\u3001\u74b0\u72b6\u304a\u3088\u3073\u7dda\u72b6\u306e\u30dd\u30ea\u30b7\u30ed\u30ad\u30b5\u30f3\u304c\u5f97\u3089\u308c\u308b[4]\u3002Su\u3068Schlegal\u306f\u3001G2\u30ec\u30d9\u30eb\u3067\u306e\u8a08\u7b97\u3092\u4f7f\u7528\u3057\u3066\u3001\u9077\u79fb\u72b6\u614b\u7406\u8ad6 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http:\/\/encyclopedia.airliquide.com\/Encyclopedia.asp?GasID=23^ a b c d Seyferth, D., Prud’Homme, C., Wiseman, G., Cyclic Polysiloxanes from the Hydrolysis of Dichlorosilane, Inorganic Chemistry, 22, 2163-2167^ a b c Vorotyntsev, V., Mochalov, G., Kolotilova, M., Kinetics of Dichlorosilane Separation from a Mixture of Chlorosilanes by Distillation Using a Regular Packing, Theoretical Foundations of Chemical Engineering, 38(4), 355-359^ a b c Seyferth D., Prud\u2019Homme C., Linear Polysiloxanes from Dichlorosilane, Inorganic Chemistry, 23, 4412-4417^ a b Walch, S., Dateo, C., Thermal Decomposition Pathways and Rates for Silane, Chlorosilane, Dichlorosilance, and Trichlorosilane, Journal of Physical Chemistry, 105, 2015-2022^ Vorotyntsev, V., Mochalov, G., Kolotilova, Volkova, E., Gas-Chromatographic and Mass-Spectrometric Determination of Impurity Hydrocarbons in Organochlorine Compounds and Dichlorosilane, Journal of Analytical Chemistry, 61(9), 883-888^ Praxair Material Safety Data 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